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Takahashi Satoru

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Publication

Featured researches published by Takahashi Satoru.

Archive | 2007

HIGH-RESOLUTION DETECTION APPARATUS AND METHOD

Takahashi Satoru; Takamasu Kiyoshi; Nishioka Hiroaki

Archive | 2007

METHOD FOR MEASURING NONDESTRUCTIVE FILM THICKNESS, AND DEVICE

Takahashi Satoru; Takamasu Kiyoshi; Nakao Toshiyuki

Archive | 2005

PHOTO-FABRICATION METHOD AND PHOTO-FABRICATION APPARATUS

Takahashi Satoru; Takamasu Kiyoshi

精密工学会大会学術講演会講演論文集 | 2016

Precision flatness measurement by an optical multi-beam angle sensor (2nd Report)-Calibration of the sensor and cylindrical surface measurement-

Chen Meiyun; Takahashi Satoru; Takamasu Kiyoshi

Archive | 2010

SURFACE PROFILE MEASURING DEVICE, SURFACE PROFILE MEASURING METHOD, EXPOSURE SYSTEM, AND DEVICE MANUFACTURING METHOD

Ine Hideki; Matsumoto Takahiro; Takamasu Kiyoshi; Takahashi Satoru

Archive | 2006

METHOD AND APPARATUS FOR FORMING FIGURE

Takahashi Satoru; Takamasu Kiyoshi

精密工学会大会学術講演会講演論文集 | 2017

In-process measurement of evanecent wave based nano-stereolithography using critical angle shift

Kong Deqing; Michihata Masaki; Takamasu Kiyoshi; Takahashi Satoru

精密工学会大会学術講演会講演論文集 | 2017

Non-contact absolute internal distance measurement between two mirrors by using a low-coherence tandem interferometer (3rd Report)-Uncertainty budget-

Winarno Agustinus; Masuda Shusei; Matsumoto Hirokazu; Takahashi Satoru; Takamasu Kiyoshi; Kitayama Takao; Endo Katsuyoshi; Kudo Ryota

応用物理学会春季学術講演会講演予稿集(CD-ROM) | 2017

Whispering Gallery Mode共振を利用したマイクロ球直径計測―楕円体モデルの構築―

Hayashi Kohei; Bohuai Chu; Z Zhao; Michihata Masaki; Takamasu Kiyoshi; Takahashi Satoru

Archive | 2017

Method for manufacturing matrix

Takahashi Satoru; Suzuki Yuki; Suzuki Kunikazu; Michihata Masaki; Takamasu Kiyoshi; Tanaka Hironao; Nishimura Suzushi

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Collaboration

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Bohuai Chu

University of Tokyo

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Matsumoto Takahiro

Canon Inc.

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