Takahiro Horiuchi

Mass Density as Basis Parameter on Mechanical Properties under Diamond-Like Carbon Prepared in Wide Range of Conditions Using Variety of Methods

Diamond-like carbon (DLC) films were prepared on steel substrates by eleven suppliers using different types of equipment utilized in each companys own coating formation process. The deposition methods include sputtering, electron cyclotron resonance chemical vapor deposition (ECR-CVD), plasma enhanced chemical vapor deposition (PECVD), arc ion plating (Arc), filtered arc deposition (FAD), and plasma-based ion implantation (PBII). Some correlation of mechanical properties seems to be valid in a narrow range of parameters produced by a particular deposition method. In order to investigate general correlations in a wide range of parameters, various DLC films were prepared by different suppliers on the same substrate, and were evaluated in exactly the same manner. Independent of deposition methods, there existed correlations of the hardness, elastic modulus and Raman shift with a wide range of mass density.

Preparation of Diamond-Like Carbon on Ti Film with Tetramethylsilane Buffer Layer

Diamond-like carbon (DLC) has been applied as a coating material to improve the basic properties of strength, chemical stability, and biocompatibility. In this study, a DLC film was prepared on a titanium (Ti) coating film with tetramethylsilane (TMS) buffer for application in vivo. Although the surface roughness of the Ti film increased with increasing Ti thickness, both TMS and DLC coatings deposited on Ti films resulted in the formation of a flat surface. Observation of the initial growth of the TMS layer indicated that a TMS buffer of more than 50 nm thickness was required for DLC coating even on the flat surface of the Ti thin film.