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Takahiro Kohashi

Hitachi

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Publication

Featured researches published by Takahiro Kohashi.

Archive | 1977

Method of pattern forming in a photosensitive composition having a reciprocity law failing property

Saburo Nonogaki; Takahiro Kohashi; Yoshio Hatano

Archive | 1984

Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching

Toshiharu Matsuzawa; Takao Iwayanagi; Kikuo Douta; Hiroshi Yanazawa; Takahiro Kohashi; Saburo Nonogaki

Archive | 1983

Method of manufacturing semiconductor device utilizing multilayer mask

Masaru Miyazaki; Susumu Takahashi; Takahiro Kohashi; Kiichi Ueyanagi

Archive | 1982

Pattern-formation method with iodine containing azide and oxygen plasma etching of substrate

Takumi Ueno; Hiroshi Shiraishi; Takao Iwayanagi; Takahiro Kohashi; Saburo Nonogaki

Archive | 1975

Formation of pattern using acrylamide-diacetoneacrylamide copolymer

Takahiro Kohashi; Motoo Akagi; Yoichi Oba; Saburo Nonogaki; Makoto Tanaka; Tadao Kaneko; Yoshifumi Tomita

Archive | 1983

Pattern formation method utilizing deep UV radiation and bisazide composition

Takao Iwayanagi; Takahiro Kohashi; Saburo Nonogaki; Yoshio Hatano

Archive | 1976

Light sensitive photoresist materials

Yoshio Hatano; Takahiro Kohashi; Michiaki Hashimoto; Saburo Nonogaki

Archive | 1983

Method of manufacturing a semiconductor device having a self-aligned gate electrode

Masaru Miyazaki; Susumu Takahashi; Takahiro Kohashi; Kiichi Ueyanagi

Archive | 1979

Lichtempfindliche masse und ihre verwendung

Takao Iwayanigi; Takahiro Kohashi; Saburo Nonogaki; Yoshio Hatano

Polymer Engineering and Science | 1977

A water-soluble, reciprocity-law-failing photoresist

Motoo Akagi; Saburo Nonogaki; Takahiro Kohashi; Yoichi Oba; Mitsuru Oikawa; Yoshifumi Tomita

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Collaboration

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Saburo Nonogaki

Hitachi

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Motoo Akagi

Hitachi

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Takao Iwayanagi

Hitachi

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Yoshio Hatano

Hitachi

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Hajime Morishita

Hitachi

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Hiroshi Shiraishi

Hitachi

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Nobuaki Hayashi

Hitachi

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Shoichi Uchino

Hitachi

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Takumi Ueno

Hitachi

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Hiroshi Yanazawa

Hitachi

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