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Takanori Mikahara

National Institute of Advanced Industrial Science and Technology

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Featured researches published by Takanori Mikahara.

Archive | 2012

CONVERGING MIRROR FURNACE

Shinichi Ikeda; Shiro Hara; Takanori Mikahara; Hitoshi Habuka; Sommawan Khumpuang

The Japan Society of Applied Physics | 2018

Si minimal CVD process measurement by exhaust gas using quartz crystal microbalance

Mitsuko Muroi; Hitoshi Habuka; Takanori Mikahara; Shinichi Ikeda; Yuuki Ishida; Shiro Hara

The Japan Society of Applied Physics | 2018

Characterization of the minimal CVD tool in the hydrodynamic point of view

Yuuki Ishida; Takanori Mikahara; Noriko Miura; Shinichi Ikeda; Takahiro Ito; Hitoshi Habuka; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2018

Method for monitoring silicon epitaxial growth process in minimal CVD reactor

Mitsuko Muroi; Miya Matsuo; Hitoshi Habuka; Takanori Mikahara; Shinichi Ikeda; Yuuki Ishida; Shiro Hara

The Japan Society of Applied Physics | 2018

Thin Gate Oxidation Process Using a Minimal Focused Light Heating Furnace

Noriko Miura; Norio Umeyama; Takeshi Yamada; Takeshi Aizawa; Shinihi Ikeda; Yuuki Ishida; Takanori Mikahara; Yasuhiro Onishi; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2017

Factor of the thickness distribution on the Minimal Si-CVD equipment

Shinichi Ikeda; Yuuki Ishida; Takanori Mikahara; Noriko Miura; Takahiro Ito; Hitoshi Habuka; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2017

Minimal CVD Process with Minimum Materials Consumption

Hitoshi Habuka; Miya Matsuo; Ayami Yamada; Ning Li; Takanori Mikahara; Shinichi Ikeda; Yuuki Ishida; Shiro Hara

The Japan Society of Applied Physics | 2016

Effect of thermal convection on Minimal Si-CVD equipment

Takanori Mikahara; Noriko Miura; Yuuki Ishida; Takahiro Ito; Shinichi Ikeda; Hitoshi Habuka; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2016

Process of Thin Thermal Oxide Film Using a Minimal Focused Light Heating Furnace with a Sealed Chamber

Noriko Miura; Takeshi Yamada; Takeshi Aizawa; Shinichi Ikeda; Yuuki Ishida; Takanori Mikahara; Hiroshi Nishizato; Norio Umeyama; Yasuhiro Onishi; Sommawan Khumpuang; Shiro Hara

The Japan Society of Applied Physics | 2016