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Dive into the research topics where Takayuki Naono is active.

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Featured researches published by Takayuki Naono.


2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) | 2015

Recent progress on development of sputtered PZT film at FUJIFILM

Yoshikazu Hishinuma; Takamichi Fujii; Takayuki Naono; Takami Arakawa; Youming Li

FUJIFILM has developed a method of forming lead zirconate titanate (PZT) films with unusual piezoelectric properties using RF sputtering. The film has a piezoelectric coefficient of d31= -250pm/V which is ~70% higher than conventional PZT film. This was made possible by high content of Nb dopant (13 at. %) and a precise control of crystal orientation. One of the most unique features of the film is observed in its polarization behavior. The film is spontaneously poled as being deposited, and the polarization is highly resistant to high temperatures. This unique feature of the film gives us great advantages during development of PZT film devices and building production lines.


Journal of Micromechanics and Microengineering | 2014

A large-scan-angle piezoelectric MEMS optical scanner actuated by a Nb-doped PZT thin film

Takayuki Naono; Takamichi Fujii; Masayoshi Esashi; Shuji Tanaka


Sensors and Actuators A-physical | 2010

Characterization of Nb-doped Pb(Zr,Ti)O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications

Takamichi Fujii; Yoshikazu Hishinuma; Tsuyoshi Mita; Takayuki Naono


Archive | 2008

PIEZOELECTRIC DEVICE, AND LIQUID DISCHARGE DEVICE USING THE PIEZOELECTRIC DEVICE

Takamichi Fujii; Takayuki Naono


Archive | 2008

Piezoelectric device, liquid droplet ejecting head using the same, and process for producing the same

Takayuki Naono; Takami Arakawa; Takamichi Fujii


Sensors and Actuators A-physical | 2015

Non-resonant 2-D piezoelectric MEMS optical scanner actuated by Nb doped PZT thin film

Takayuki Naono; Takamichi Fujii; Masayoshi Esashi; Shuji Tanaka


Archive | 2009

Film formation method, film formation device, piezoelectric film, piezoelectric device, liquid discharge device and piezoelectric ultrasonic transducer

Takamichi Fujii; Takayuki Naono; Takami Arakawa


Archive | 2010

Film formation method, film formation device, piezoelectric film, piezoelectric device and liquid discharge device

Takamichi Fujii; Takayuki Naono


Archive | 2009

Piezoelectric device, piezoelectric device manufacturing method, and liquid discharge apparatus

Yoshikazu Hishinuma; Takehiro Kasahara; Yasukazu Nihei; Takamichi Fujii; Yuuichi Okamoto; Takami Arakawa; Takayuki Naono


Archive | 2008

Piezoelectric device, process for producing the same, and liquid discharge device

Takamichi Fujii; Takayuki Naono; Yoshikazu Hishinuma

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