Takeshi Kamigaichi | Researchain

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Featured researches published by Takeshi Kamigaichi.

Archive | 2006

Nonvolatile semiconductor memory device having element isolating region of trench type

Michiharu Matsui; Seiichi Mori; Riichiro Shirota; Yuji Takeuchi; Takeshi Kamigaichi

Archive | 2014

Stacked multilayer structure and manufacturing method thereof

Makoto Mizukami; Takeshi Kamigaichi

Archive | 2007

MULTILAYER WIRING STRUCTURE AND MANUFACTURING METHOD THEREOF, AND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Takeshi Kamigaichi; Makoto Mizukami; 岳司上垣内; 誠水上

Archive | 2001

Nonvolatile semiconductor memory device having element isolating region of trench type and method of manufacturing the same

Michiharu Matsui; Seiichi Mori; Riichiro Shirota; Yuji Takeuchi; Takeshi Kamigaichi

symposium on vlsi technology | 2003

A novel self-aligned shallow trench isolation cell for 90 nm 4 Gbit NAND flash EEPROMs

M. Ichige; Yoshiaki Takeuchi; K. Sugimae; A. Sato; M. Matsui; Takeshi Kamigaichi; H. Kutsukake; Y. Ishibashi; Masanobu Saito; S. Mori; H. Meguro; S. Miyazaki; T. Miwa; S. Takahashi; T. Iguchi; N. Kawai; S. Tamon; N. Arai; H. Kamata; T. Minami; H. Iizuka; M. Higashitani; T. Pham; G. Hemink; M. Momodomi; R. Shirota

Archive | 2004