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Takeshi Moriya

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Publication

Featured researches published by Takeshi Moriya.

Archive | 2004

Plasma treatment apparatus, ring member, and plasma treatment method

Takeshi Moriya; Hiroshi Nagaike; Yasuharu Sasaki; 康晴 佐々木; 剛 守屋; 宏史 長池

Archive | 2004

METHOD OF CLEANING MEMBER AND SUBSTRATE PROCESSING APPARATUS

Takeshi Moriya; Hiroshi Nagaike; Hiroyuki Nakayama; 博之 中山; 剛 守屋; 宏史 長池

Archive | 2004

Vacuum equipment, its particle monitoring method, program and particle monitoring window member

Takeshi Moriya; Hiroyuki Nakayama; 博之 中山; 剛 守屋

Archive | 2008

INTERMEDIATE CONVEYANCE CHAMBER, EXHAUST METHOD THEREOF, AND SUBSTRATE PROCESSING SYSTEM

Keisuke Kondo; Takeshi Moriya; Hiroyuki Nakayama; Hiroki Oka; 博之 中山; 剛 守屋; 寛樹 岡; 圭祐 近藤

Archive | 2005

Unit cleaning method and substrate treater for depressurizing chamber

Takeshi Moriya; Hiroshi Nagaike; Hiroyuki Nakayama

Archive | 2004

Method for producing ceramic-sprayed member, program for carrying out the method, storage medium and ceramic-sprayed member

Keigo Kobayashi; Takeshi Moriya; Hiroshi Nagaike; Hiroyuki Nakayama; Kaname Yasuda; 博之 中山; 剛 守屋; 要 安田; 啓悟 小林; 宏史 長池

Archive | 2005

Method of washing process device, program for performing same, and storage medium

Takeshi Moriya; Hiroshi Nagaike; Hiroyuki Nakayama; 博之 中山; 剛 守屋; 宏史 長池

Archive | 2010

Method of cleaning member in vacuum processing chamber and substrate processing apparatus

Takeshi Moriya; Hiroshi Nagaike; Hiroyuki Nakayama; 博之 中山; 剛 守屋; 宏史 長池

Archive | 2005

METHOD FOR REMOVING MOISTURE IN VACUUM CONTAINER, PROGRAM FOR EXEUCTING THE METHOD, AND STORAGE MEDIUM

Takeshi Moriya; Hiroshi Nagaike; Hiroyuki Nakayama; 博之 中山; 剛 守屋; 宏史 長池

Archive | 2005

真空容器の水分除去方法、該方法を実行するためのプログラム、及び記憶媒体

Takeshi Moriya; Hiroshi Nagaike; Hiroyuki Nakayama; 博之 中山; 剛 守屋; 宏史 長池

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Collaboration

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Hiroyuki Nakayama

Mitsubishi

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Hiroshi Nagaike

Tokyo Electron

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Hiroki Oka

Tokyo Electron

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Kaname Yasuda

Tokyo Electron

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Kaoru Fujiwara

Tokyo Electron

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Keigo Kobayashi

Tokyo Electron

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Manabu Shimada

Ebara Corporation

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Teruyuki Hayashi

National Institute of Advanced Industrial Science and Technology

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Yasuharu Sasaki

Tokyo Electron

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要 安田

JTEKT

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