Takeshi Nagai

Structure and mechanical properties of r.f. sputtered SiC films

Amorphous and polycrystalline SiC films were prepared on glass, sapphire and silicon substrates by r.f. sputtering of a SiC cathode in argon. From evaluation of their mechanical properties, it was found that the films have a Vickers hardness of 4000 kg mm−2, similar to bulk SiC, and can be used to make hard surface coatings due to their high wear resistance. Mixed carbide (Si, B)C films prepared by r.f. sputtering exhibit a Vickers hardness of 4500 kg mm−2 and are also usable for hard coatings.