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Takeshi Shirai

Nikon

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Publication

Featured researches published by Takeshi Shirai.

Archive | 1997

Mirror for high-intensity ultraviolet light beam

Takeshi Shirai; Junji Aboshi

Archive | 2004

Optical element and exposure apparatus

Takeshi Shirai; Takao Kokubun; Hitoshi Ishizawa; Atsunobu Murakami

Archive | 2004

Optical element and exposure device

Takeshi Shirai; Takao Kokubun; Hitoshi Ishizawa; Atsunobu Murakami

Archive | 1999

three layer anti-reflective coating for optical substrate

Takeshi Shirai

Archive | 1999

Mirror for an ultraviolet laser and method

Takeshi Shirai

Archive | 2003

Multilayer antireflection film, optical member, and reduction projection exposure apparatus

Takeshi Shirai

Archive | 1998

Multilayer antireflection coatings for grazing ultraviolet incident light

Hiroshi Nakamura; Takeshi Shirai

Archive | 2005

Optical element and projection exposure apparatus based on use of the optical element

Takeshi Shirai

Archive | 1998

Method for reducing reflection of grazing incident p-polarized ultraviolet light from a surface of a substrate

Hiroshi Nakamura; Takeshi Shirai

Archive | 1997

Multi-layer reflection preventing film

Hiroshi Nakamura; Takeshi Shirai; 浩 中村; 健 白井

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Atsunobu Murakami

Nikon

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Hitoshi Ishizawa

Nikon

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Takao Kokubun

Nikon

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Hiroshi Nakamura

Nikon

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Junji Aboshi

Nikon

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