Taketoshi Yonezawa

Applications of diamond-like carbon films to electronic components

Diamond-like carbon (DLC) films show remarkable characteristics such as high mechanical hardness, low friction and chemical stability. Therefore, they are very suitable as protective layers. We examined DLC films as protective layers for metal evaporated tapes, cylinders and capstans which are used in video tape recorders.

A New Interferometric Alignment Technique with Holographic Configuration

A new interferometric alignment technique using a holographic configuration with a precision of the order of tens of nm has been developed for registering a grating on a substrate to an interference fringe of two conjugate beams in a space. The alignment between a grating and a fringe was determined from the moire image generated by the beams diffracted from the grating, and a theoretical analysis was performed to calculate the intensity of the moire image. The experimental results were in good agreement with the calculations. The application of the method to a wafer stepper with submicron resolution is proposed.

Applications of Diamond — Like Carbon Films to Electronic Components

Abstract Diamond — like carbon films (DLC films) show remarkable characteristics such as high mechanical hardness, low friction, chemical stability, etc. Therefore, DLC films are greatly suitable as a protective layer. We examined DLC films as a protective layer for components of VTR (Video Tape Recorder), metal evaporated tapes, and cylinders.