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Tamio Hara

Tokyo Electron

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Publication

Featured researches published by Tamio Hara.

Solid State Lasers III | 1992

Compact soft x-ray laser pumped by a pulse train laser (Invited Paper)

Tamio Hara; Kozo Ando; Fumiko Negishi-Tsuboi; Yoshinobu Aoyagi; Hideo Hirose; Hidehiko Yashiro

Amplified spontaneous emissions of Li-and Be-like Al ions and Li-like Si ions were observed in recombining plasmas produced by a low-power driving laser. These were achieved by heating plasma with a train of laser pulses of short interval, and sharply focusing a pumping laser to a line 40 micrometers wide onto a slab target for rapid cooling of plasmas through adiabatic expansion. Mechanism of plasma heating and the optimum shape of the laser pulse for pumping soft X-ray lasers were also investigated.

Laser Diode Technology and Applications IV | 1992

Low-energy damageless Cl2 RIBE of AlGaAs for fabricating laser diodes

Jinzhong Yu; Manabu Hamagaki; Tamio Hara; Yoshinobu Aoyagi; Yoshihiko Yuba; Susumu Namba

No abstract available

Archive | 1987

Ion-producing apparatus

Tamio Hara; Manabu Hamagaki; Yoshinobu Aoyagi; Susumu Namba; Nobuo Ishii; Naoki Takayama; Kohei Kawamura

Archive | 1992

Electron beam excited ion irradiation apparatus

Tamio Hara; Manabu Hamagaki; Katsunobu Aoyagi; Takeshi Yamada; Makoto Ryoji; Masakuni Tokai; Yosuke Kajiyama

Archive | 1986

Electron beam-excited ion beam source

Tamio Hara; Manabu Hamagaki; Yoshinobu Aoyagi; Susumu Namba

Proceedings of the Japan Academy. Ser. B: Physical and Biological Sciences | 1989

Soft X-ray lasing in Al plasma produced by a low power laser.

Tamio Hara; Kozo Ando; Naoto Kusakabe; Hidehiko Yashiro; Yoshinobu Aoyagi

Japanese journal of applied physics. Pt. 1, Regular papers & short notes | 1994

Potential Profiles in an Electron-Beam-Excited Plasma ( Plasma Processing)

Manabu Hamagaki; Tamio Hara

Archive | 1992

Soft-X-Ray Spectra from Laser Plasma Effectively Heated by a Pulse Train laser,

Hideo Hirose; Tamio Hara; Kozo Ando; Fumiko Negishi-Tsuboi; Hidehiko Yashiro

JJAP series | 1991

Layer-By-Layer Controlled Digital Etching by Means of an Electron-Beam-Excited Plasma System : Etching and Deposition Technology

Takashi Meguro; Masashi Ishii; Hirokazu Kodama; Manabu Hamagaki; Tamio Hara; Yasuhiro Yamamoto; Yoshinobu Aoyagi

JJAP series | 1989

Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam excited Plasma(EBEP) System : Etching and Deposition Technology

Jin-Zhong Yu; Norio Masui; Yoshihiko Yuba; Tamio Hara; Manabu Hamagaki; Yoshinobu Aoyagi; Kenji Gamo; Susumu Nambu

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Manabu Hamagaki

Tokyo Electron

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Yoshinobu Aoyagi

Tokyo Electron

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Susumu Namba

Nagasaki Institute of Applied Science

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Hidehiko Yashiro

National Institute of Advanced Industrial Science and Technology

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Kozo Ando

Shimadzu Corp.

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Hideo Hirose

Shimadzu Corp.

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Yoshihiko Yuba

Osaka University

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Hirokazu Kodama

Hosei University

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Kenji Gamo

Osaka University

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Kohei Kawamura

Tokyo Electron

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