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Tamotsu Maruyama

East Tennessee State University

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Publication

Featured researches published by Tamotsu Maruyama.

Archive | 1995

Semiconductor single crystalline substrate and method for production thereof

Tamotsu Maruyama; Shigeyuki Sato

Archive | 2005

Phase shift mask blank, phase shift mask, and method for fabricating them

Sadaomi Inazuki; Tamotsu Maruyama; Satoshi Okazaki; Hiroki Yoshikawa; 保 丸山; 博樹 吉川; 智 岡崎; 判臣 稲月

Archive | 1997

Method for manufacturing silicon single crystal substrate for use of epitaxial layer growth

Tamotsu Maruyama; Hiroki Ose

Archive | 2001

Phase shift mask blank, phase shift mask, and methods of manufacture

Yukio Inazuki; Tamotsu Maruyama; Mikio Kojima; Hideo Nakakubiki Kaneko; Masataka Watanabe; Satoshi Okazaki

Archive | 2002

Photomask blank, photomask and method for producing these

Sadaomi Inazuki; Hideo Kaneko; Mikio Kojima; Tamotsu Maruyama; Satoshi Okazaki; Tsutomu Shinagawa; 保 丸山; 勉 品川; 幹夫 小島; 智 岡崎; 判臣 稲月; 英雄 金子

Archive | 2002

PHASE SHIFT MASK BLANK, PHASE SHIFT MASK AND METHOD FOR PRODUCING THE SAME

Sadaomi Inazuki; Hideo Kaneko; Tamotsu Maruyama; Satoshi Okazaki; 保 丸山; 智 岡崎; 判臣 稲月; 英雄 金子

Archive | 2002

Phase shift mask blank, phase shift mask and method for producing these

Sadaomi Inazuki; Hideo Kaneko; Mikio Kojima; Tamotsu Maruyama; Satoshi Okazaki; Masataka Watanabe; 保 丸山; 幹夫 小島; 智 岡崎; 政孝 渡邉; 判臣 稲月; 英雄 金子

Archive | 2001

Phase shift mask and method of manufacture

Satoshi Okazaki; Tamotsu Maruyama; Yukio Inazuki; Hideo Kaneko; Shinichi Kohno

Archive | 1999

MAGNETRON SPUTTERING SYSTEM AND SPUTTERING METHOD

Sadaomi Inazuki; Hideo Kaneko; Tamotsu Maruyama; Satoshi Okazaki; 保 丸山; 智 岡崎; 判臣 稲月; 英雄 金子

Archive | 2006

Photo mask blank, photo mask, and their fabrication method

Hiroki Yoshikawa; Hiroshi Kubota; Yoshinori Kinase; Satoshi Okazaki; Tamotsu Maruyama; Takashi Haraguchi; Masahide Iwakata; Yuichi Fukushima; Tadashi Saga

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Satoshi Okazaki

East Tennessee State University

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Hiroki Yoshikawa

Hitachi

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Hideo Kaneko

Shin-Etsu Chemical

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Masahide Iwakata

Shin-Etsu Chemical

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Tadashi Saga

Shin-Etsu Chemical

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Takashi Haraguchi

Shin-Etsu Chemical

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Yoshinori Kinase

Shin-Etsu Chemical

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Yuichi Fukushima

MITSUBISHI MATERIALS CORPORATION

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Hiroki Ose

East Tennessee State University

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Mikio Kojima

East Tennessee State University

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