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Tanaka Hiroaki

Tohoku University

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Publication

Featured researches published by Tanaka Hiroaki.

Archive | 2010

METHOD OF FORMING CONTACT, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE

Omi Tadahiro; Teramoto Akinobu; Isogai Tatsunori; Tanaka Hiroaki

Archive | 2015

MOSFET in three-dimensional structure and manufacturing method thereof

Suwa Tomoyuki; Tanaka Hiroaki

Archive | 2015

Three-dimensional structure of MOSFET and manufacturing method thereof

Suwa Tomoyuki; Tanaka Hiroaki; Ohmi Tadahiro

Archive | 2014

MOSFET HAVING 3D-STRUCTURE AND MANUFACTURING METHOD FOR SAME

Suwa Tomoyuki; Tanaka Hiroaki; Ohmi Tadahiro

Technical report of IEICE. SDM | 2012

Low Temperature PECVD of High Quality Silicon Nitride for Gate Spacer

Nakao Yukihisa; Teramoto Akinobu; Kuroda Rihito; Suwa Tomoyuki; Tanaka Hiroaki; Sugawa Shigetoshi; Ohmi Tadahiro

Archive | 2012

Kontaktbildungsverfahren, Verfahren zum Herstellen einer Halbleitervorrichtung, und Halbleitervorrichtung

Ohmi Tadahiro; Teramoto Akinobu; Isogai Tatsunori; Tanaka Hiroaki

Archive | 2010

Contact forming method, method of manufacturing a semiconductor device and semiconductor device

Ohmi Tadahiro; Teramoto Akinobu; Isogai Tatsunori; Tanaka Hiroaki

IEICE Technical Report; IEICE Tech. Rep. | 2010

High Current Drivability FD-SOI CMOS with Low Source/Drain Series Resistance

Nakao Yukihisa; Kuroda Rihito; Tanaka Hiroaki; Teramoto Akinobu; Sugawa Shigetoshi; Ohmi Tadahiro

IEICE Technical Report; IEICE Tech. Rep. | 2010

Low Resistance Source/Drain Contacts with Low Schottky Barrier for High Performance Transistors

Tanaka Hiroaki; Kuroda Rihito; Nakao Yukihisa; Teramoto Akinobu; Sugawa Shigetoshi; Ohmi Tadahiro

Archive | 2009

CONTACT FORMING METHOD, METHOD FOR MANUFACTURING FOR SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE

Omi Tadahiro; Teramoto Akinobu; Tanaka Hiroaki; Isogai Tatsunori

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Ohmi Tadahiro

Canon Inc.

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Teramoto Akinobu

Tohoku University

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Isogai Tatsunori

Tohoku University

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Kuroda Rihito

Tohoku University

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Sugawa Shigetoshi

Canon Inc.

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Suwa Tomoyuki

Tohoku University

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