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Tatsuhisa Matsunaga

Hitachi

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Publication

Featured researches published by Tatsuhisa Matsunaga.

Archive | 2002

Substrate processing apparatus and a method for fabricating a semiconductor device by using same

Tatsuhisa Matsunaga; Hiroshi Sekiyama; Kouichi Noto

Archive | 2001

Dual loading port semiconductor processing equipment

Takanobu Nakashima; Tatsuhisa Matsunaga; Hidehiro Yanagawa

Archive | 2003

Heat treatment apparatus and method for processing substrates

Takatomo Yamaguchi; Kazuhiro Morimitsu; Tatsuhisa Matsunaga

Archive | 2002

Substrate processing apparatus, conveying unit thereof, and semiconductor device fabricating Method

Tatsuhisa Matsunaga; Hiroshi Sekiyama

Archive | 2003

Semiconductor device producing apparatus and producing method of semiconductor device

Kazuhiro Morimitsu; Tatsuhisa Matsunaga; Masanori Kaneko; Kouichi Noto; Hidehiro Yanagawa; Masaki Matsushima

Archive | 2003

Method and apparatus for processing substrates and method for manufacturing a semiconductor device

Tatsuhisa Matsunaga; Masahiro Teramoto; Norio Akutsu; Kouichi Noto

Archive | 2001

Substrate processor, substrate treatment method and method for manufacturing semiconductor device

Tatsuhisa Matsunaga; Takayoshi Nakajima; Hidehiro Yanagawa; 考宜 中島; 建久 松永; 秀宏 柳川

Archive | 1992

Production system for molded and pressed parts

Takeshi Kawana; Toshiyuki Amimoto; Yasuhiro Fujita; Yuuji Enomoto; Tatsuya Niinomi; Sadao Ohara; Shin Hashizume; Yasuo Shibasaki; Tatsuhisa Matsunaga; Takeshi Yano

Archive | 2001

Semiconductor manufacturing apparatus, and manufacturing method of semiconductor apparatus

Tatsuhisa Matsunaga; Koichi Noto; 建久 松永; 幸一 能戸

Archive | 2008

Method of carrying substrate, method of processing substrate, and manufacturing method of semiconductor device

Tatsuhisa Matsunaga; Takayoshi Nakajima; Hidehiro Yanagawa; 考宜 中島; 建久 松永; 秀宏 柳川

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Collaboration

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Hidehiro Yanagawa

Hitachi

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Kouichi Noto

Hitachi

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Sadao Ohara

Hitachi

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Shin Hashizume

Hitachi

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Takeshi Kawana

Hitachi

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Takeshi Yano

Hitachi

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Toshiyuki Amimoto

Hitachi

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Yasuhiro Fujita

Hitachi

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Hiroshi Sekiyama

Hitachi

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Kazuhiro Morimitsu

Hitachi

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