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Tatsuo Ohtani

Yamaguchi University

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Publication

Featured researches published by Tatsuo Ohtani.

Archive | 1995

Method and apparatus for mirror-polishing a wafer portion

Fumihiko Hasegawa; Koichiro C; O Fujikoshi Machinery Corp. Ichikawa; Yasuo C; O Fujikoshi Machinery Corp. Inada; Yasuyoshi Kuroda; Tatsuo Ohtani

Archive | 1995

Verfahren und Vorrichtung zum Hochglanzpolieren eines Teiles von einem Wafer Method and apparatus for mirror-polishing a portion of a wafer

Fumihiko Hasegawa; Tatsuo Ohtani; Yasuyoshi Kuroda; Koichiro Ichikawa; Yasuo Inada

Archive | 1994

Poliergerät für Einschnitt-Teil eines Wafers Polisher for Nick part of a wafer

Fumihiko Hasegawa; Tatsuo Ohtani; Koichiro Ichikawa; Yoshio Nakamura

Archive | 1994

Gerät zum Polieren eines Wafereinschnitts An apparatus for polishing a wafer notch

Fumihiko Hasegawa; Tatsuo Ohtani; Yasuyoshi Kuroda; Koichiro Ichikawa; Yasuo Inada

Archive | 1994

Vorrichtung zum Polieren des Umfangs eines Wafers An apparatus for polishing the periphery portion of a wafer

Fumihiko Hasegawa; Tatsuo Ohtani; Yasuyoshi Kuroda; Koichiro Ichikawa; Yasuo Inada

Archive | 1994

An apparatus for polishing a wafer notch

Fumihiko Hasegawa; Tatsuo Ohtani; Yasuyoshi Kuroda; Koichiro Ichikawa; Yasuo Inada

Archive | 1993

Vorrichtung zum Polieren von Fasen auf Halbleiterscheiben An apparatus for polishing bevels on semiconductor wafers

Fumihiko Hasegawa; Yasuyoshi Kuroda; Tatsuo Ohtani

Archive | 1993

Methode und Vorrichtung zum Polieren der Rundkanten von Wafern

Fumihiko Hasegawa; Tatsuo Ohtani; Hiroshi Kawano; Masayuki Yamada

Archive | 1993

Method and apparatus for polishing the round edges of wafers

Fumihiko Hasegawa; Tatsuo Ohtani; Hiroshi Kawano; Masayuki Yamada

Archive | 1993

Maschine zum Kantenscheifen von Halbleiterplatten

Fumihiko Hasegawa; Tatsuo Ohtani; Yasuyoshi Kuroda

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Fumihiko Hasegawa

East Tennessee State University

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Yasuyoshi Kuroda

East Tennessee State University

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Yukinori Okazaki

Yamaguchi University

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Hiroshi Kawano

Yamaguchi University

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Koichiro Ichikawa

East Tennessee State University

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Masayuki Yamada

Kyushu Institute of Technology

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Tadayoshi Takemoto

University of Arkansas for Medical Sciences

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Yasuo Inada

East Tennessee State University

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Yoshito Ohshita

Yamaguchi University

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Hiroshi Fujimura

Yamaguchi University

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