Tatsuya Kubozono
Nitto Denko
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Tatsuya Kubozono.
Proceedings of SPIE, the International Society for Optical Engineering | 1996
Tatsuya Kubozono; Yutaka Moroishi; Yoshio Ohta; Hideaki Shimodan; Noboru Moriuchi
A novel concept for the resist removal after the photolithography in the wafer process is introduced. This new process is to peel off the resist layer with a special adhesive tape. A very little contamination on wafers is confirmed. Especially the metal contamination with this new process is very little compared with conventional O2 plasma ashing. Therefore the electrical properties of oxide layer and substrate are significantly improved. This new process should be very effective for the production of front-edge devices because of this improvement. In this paper, along with these observations, the mechanism of the removal is discussed. The monomer in the adhesive layer migrates into the resist layer and the two layers consolidated together. Very fine microanalysis technique to detect this phenomenon in situ is also explained.
Archive | 1999
Shouji Yamamoto; Yoshio Nakagawa; Tatsuya Kubozono; Kouji Akazawa; Kouichi Hashimoto; Takahiro Fukuoka
Archive | 1999
Mitsuharu Akazawa; Takahiro Fukuoka; Koichi Hashimoto; Tatsuya Kubozono; Yoshio Nakagawa; 善夫 中川; 達也 久保園; 浩一 橋本; 孝博 福岡; 光治 赤沢
Archive | 2001
Kouichi Hashimoto; Takahiro Fukuoka; Koji Akazawa; Yoshio Nakagawa; Tatsuya Kubozono
Archive | 1996
Takayuki Yamamoto; Tatsuya Kubozono; Yasuo Kihara; Yuji Okawa; Koichi Hashimoto; Takeshi Matsumura; Tatsuya Sekido; Masayuki Yamamoto; Chiaki Harada
Archive | 1999
Mitsuharu Akazawa; Takahiro Fukuoka; Koichi Hashimoto; Tatsuya Kubozono; Yoshio Nakagawa; Masashi Yamamoto; 善夫 中川; 達也 久保園; 昌司 山本; 浩一 橋本; 孝博 福岡; 光治 赤沢
Archive | 1998
Mitsuharu Akazawa; Tatsuya Kubozono; Yoshio Nakagawa; 義夫 中川; 達也 久保園; 光治 赤沢
Archive | 2000
Mitsuharu Akazawa; Takahiro Fukuoka; Koichi Hashimoto; Tatsuya Kubozono; Yoshio Nakagawa; 善夫 中川; 達也 久保園; 浩一 橋本; 孝博 福岡; 光治 赤沢
Archive | 1999
Mitsuharu Akazawa; Takahiro Fukuoka; Koichi Hashimoto; Tatsuya Kubozono; Yoshio Nakagawa; 善夫 中川; 達也 久保園; 浩一 橋本; 孝博 福岡; 光治 赤沢
Archive | 1996
Takayuki Yamamoto; Tatsuya Kubozono; Yasuo Kihara; Yuji Okawa; Koichi Hashimoto; Takeshi Matsumura; Tatsuya Sekido; Masayuki Yamamoto; Chiaki Harada
