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Tea Young Lee

Inha University

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Publication

Featured researches published by Tea Young Lee.

Thin Solid Films | 2012

High density plasma reactive ion etching of CoFeB magnetic thin films using a CH4/Ar plasma

Eun Ho Kim; Tea Young Lee; Byoung-Chul Min; Chee Won Chung

Vacuum | 2013

Etch characteristics of CoFeB magnetic thin films using high density plasma of a H2O/CH4/Ar gas mixture

Il Hoon Lee; Tea Young Lee; Chee Won Chung

Thin Solid Films | 2013

Characteristics of CdS thin films deposited on glass and Cu(In,Ga)Se2 layer using chemical bath deposition

Tea Young Lee; Il Hoon Lee; Sung Hee Jung; Chee Won Chung

Thin Solid Films | 2012

Inductively coupled plasma reactive ion etching of FePt magnetic thin films in a CH4/O2/Ar plasma

Tea Young Lee; Eun Ho Kim; Il Hoon Lee; Chee Won Chung

Thin Solid Films | 2012

Inductively coupled plasma reactive ion etching of IrMn magnetic thin films using a CH4/O2/Ar gas

Tea Young Lee; Eun Ho Kim; Chee Won Chung

Vacuum | 2014

Etch characteristics of MgO thin films in Cl2/Ar, CH3OH/Ar and CH4/Ar plasmas

Il Hoon Lee; Tea Young Lee; Su Min Hwang; Chee Won Chung

Thin Solid Films | 2013

Inductively coupled plasma reactive ion etching of magnetic tunnel junction stacks using H2O/CH4 mixture

Tea Young Lee; Il Hoon Lee; Chee Won Chung

Microelectronic Engineering | 2013

Investigation on etch characteristics of FePt thin films using a H2O/Ar plasma

Il Hoon Lee; Tea Young Lee; Chee Won Chung

ECS Journal of Solid State Science and Technology | 2012

Influence of O2 Gas on Etch Profile of Magnetic Tunnel Junction Stacks Etched in a CH4/O2/Ar Plasma

Tea Young Lee; Eun Ho Kim; Il Hoon Lee; Chee Won Chung

한국진공학회 학술발표회초록집 | 2012

Effects of Etch Parameters on Etching of CoFeB Thin Films in CH₄/O₂/Ar Mix

Tea Young Lee; Il Hoon Lee; Chee Won Chung

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Chee Won Chung

Inha University

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Il Hoon Lee

Inha University

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Eun Ho Kim

Inha University

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Byoung-Chul Min

Korea Institute of Science and Technology

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Su Min Hwang

Inha University

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Sung Hee Jung

Inha University

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