Terry A. Johnson

Filter windows for EUV lithography

Extreme-ultraviolet (EUV) lithography based on reflective optics is expected to require at least one filter window to 1) reduce out-of-band radiation in the ultraviolet, visible and infrared, 2) partially protect the optics from debris from the radiation source and any outgassing from the resist on the wafer, and 3) perhaps to serve as a barrier for EUV absorbing gasses. To maximize wafer throughput, the filter window or windows will need to provide the highest possible transmittance at 13.4 nm. EUV filters must operate in a harsh vacuum environment. They will be irradiated with high energy EUV light and will absorb out-of-band radiation that will cause temperature increases of greater than 100 degree(s)C. Outgassing from the filters must be minimal, and they must survive handling as well as pressure differentials during pump-down operation, and return-to-atmospheric pressure. Prototype filters were fabricated for Sandias Engineering Test Stand (ETS) and are being utilized in on-going EUV lithography demonstrations. Their in and out-of-band transmittance has been measured and found to meet Sandias performance specifications, and they have been exposed to various environments with good results.

Performance of a full-scale hydrogen-storage tank based on complex hydrides.

Designing and building a full scale hydrogen storage system revealed several engineering challenges and also demonstrated the capabilities of complex hydrides. Three kg of hydrogen was stored in a four module system using modified sodium alanate as the storage media. Extensive testing of this system demonstrated the ability to follow aggressive hydrogen demand schedules that simulate actual driving. Extensive use of detailed models greatly improved the design and eventual performance of the storage system; the test data permitted further refinement of the models.

Heat and Mass Transport in Metal Hydride Based Hydrogen Storage Systems

Hydrogen storage technologies based on solid-phase materials involve highly coupled transport processes including heat transfer, mass transfer, and chemical kinetics. A full understanding of these processes and their relative impact on system performance is required to enable the design and optimization of efficient systems. This paper examines the coupled transport processes of titanium doped sodium alanates (NaAlH4 , Na3 AlH6 ) enhanced with excess aluminum and expanded natural graphite. Through validated modeling and simulation, we have illuminated transport bottlenecks that arise due to mass transfer limitations in scaled-up systems. Individual heat transport, mass transport, and chemical kinetic processes were isolated and experimentally characterized to generate a robust set of model parameters for all relevant operational states. The individual transport models were then coupled to simulate absorption processes associated with rapid refueling of scaled-up systems. Using experimental data for the absorption performance of a 1.6 kg sodium alanate system, comparisons were made to computed results to identify dominant transport mechanisms. The results indicated that channeling around the compacted porous solid can contribute significantly to the overall transport of hydrogen into and out of the system. The application of these transport models is generally applicable to a variety of condensed-phase hydrogen sorption materials and facilitates the design of optimally performing systems.Copyright

Zirconium and niobium transmission data at wavelengths from 11-16 nm and 200-1200 nm

Transmission measurements of niobium and zirconium at both extreme-ultraviolet (EUV) and ultraviolet, visible, and near infrared (UV/Vis/NIR) wavelengths are presented. Thin foils of various thicknesses mounted on nickel mesh substrates were measured, and these data were used to calculate the optical constants delta and beta of the complex refractive index n = 1- δ + iβ. β values were calculated directly from the measured transmittance of the foils after normalizing for the nickel mesh. The average beta values for each set of foils are presented as a function of wavelength. The real (dispersive) part of the refractive index, delta was then calculated from Kramers-Kronig analysis by combining these beta values with those from previous experimental data and the atomic tables.

Lithographic characterization of improved projection optics in the EUVL engineering test stand

Static and scanned images of 100nm dense features for a developmental set of l/14 optics (projection optics box # 1, POB 1) in the Engineering Test Stand (ETS) were successfully obtained with various LPP source powers last year. The ETS with POB1 has been used to understand initial system performance and lithographic learning. Since then, numerous system upgrades have been made to improve ETS lithographic performance to meet or exceed the original design objectives. The most important upgrade is the replacement of POB 1 with an improved projection optics system, POB2, having lower figure error (l/20 rms wavefront error) and lower flare. Both projection optics boxes are a four-mirror design with a 0.1 numerical aperture. Scanned 70-nm dense features have been successfully printed using POB2. Aerial image contrast measurements have been made using the resist clearing method. The results are in good agreement to previous POB2 aerial image contrast measurements at the subfield exposure station (SES) at Lawrence Berkeley National Laboratory. For small features the results deviate from the modeling predictions due to the inherent resolution limit of the resist. The intrinsic flare of POB2 was also characterized. The experimental results were in excellent agreement with modeling predictions. As predicted, the flare in POB2 is less than 20% for 2μm features, which is two times lower than the flare in POB1. EUV flare is much easier to compensate for than its DUV counterpart due to its greater degree of uniformity and predictability. The lithographic learning obtained from the ETS will be used in the development of EUV High Volume Manufacturing tools. This paper describes the ETS tool ETS tool setup, both static and scanned, that was required after the installation of POB2. The paper will also describe the lithographic characterization of POB2 in the ETS and cmpare those results to the lithographic results obtained last year with POB1.

System and process learning in a full-field, high-power EUVL alpha tool

Full-field imaging with a developmental projection optic box (POB 1) was successfully demonstrated in the alpha tool Engineering Test Stand (ETS) last year. Since then, numerous improvements, including laser power for the laser-produced plasma (LPP) source, stages, sensors, and control system have been made. The LPP has been upgraded from the 40 W LPP cluster jet source used for initial demonstration of full-field imaging to a high-power (1500 W) LPP source with a liquid Xe spray jet. Scanned lithography at various laser drive powers of >500 W has been demonstrated with virtually identical lithographic performance.

Performance upgrades in the EUV Engineering Test Stand

The EUV Engineering Test Stand (ETS) has demonstrated the printing of 100-nm-resolution scanned images. This milestone was first achieved while the ETS operated in an initial configuration using a low power laser and a developmental projection system, PO Box 1. The drive laser has ben upgraded to a single chain of the three-chain Nd:YAG laser developed by TRW. The result in exposure time is approximately 4 seconds for static exposures. One hundred nanometer dense features have been printed in step-and-scan operation with the same image quality obtained in static printing. These experiments are the first steps toward achieving operation using all three laser chains for a total drive laser power of 1500 watts. In a second major upgrade the developmental wafer stage platen, used to demonstrate initial full-field imaging, has been replaced with the final low-expansion platen made of Zerodur. Additional improvements in the hardware and control software have demonstrated combined x and jitter from 2 to 4 nm RMS Over most of the wafer stage travel range, while scanning at the design scan speed of 10 mm/s at the wafer. This value, less than half of the originally specified jitter, provides sufficient stability to support printing of 70 nm features as planned, when the upgraded projection system is installed. The third major upgrade will replace PO Box 1 with an improved projection system, PO Box 2, having lower figure error and lower flare. In addition to these upgrades, dose sensors at the reticle and wafer planes and an EUV- sensitive aerial image monitor have been integrated into the ETS. This paper reports on ETS system upgrades and the impact on system performance.

Lithographic evaluation of the EUV engineering test stand

Static and scanned images of 100 nm dense features were successfully obtained with a developmental set of projection optics and a 500W drive laser laser-produced-plasma (LPP) source in the Engineering Test Stand (ETS). The ETS, configured with POB1, has been used to understand system performance and acquire lithographic learning which will be used in the development of EUV high volume manufacturing tools. The printed static images for dense features below 100 nm with the improved LPP source are comparable to those obtained with the low power LPP source, while the exposure time was decreased by more than 30x. Image quality comparisons between the static and scanned images with the improved LPP source are also presented. Lithographic evaluation of the ETS includes flare and contrast measurements. By using a resist clearing method, the flare and aerial image contrast of POB1 have been measured, and the results have been compared to analytical calculations and computer simulations.

Parameter study of a vehicle-scale hydrogen storage system.

Sandia National Laboratories has developed a vehicle-scale prototype hydrogen storage system as part of a Work For Others project funded by General Motors. This Demonstration System was developed using the complex metal hydride sodium alanate. For the current work, we have continued our evaluation of the GM Demonstration System to provide learning to DOEs hydrogen storage programs, specifically the new Hydrogen Storage Engineering Center of Excellence. Baseline refueling data during testing for GM was taken over a narrow range of optimized parameter values. Further testing was conducted over a broader range. Parameters considered included hydrogen pressure and coolant flow rate. This data confirmed the choice of design pressure of the Demonstration System, but indicated that the system was over-designed for cooling. Baseline hydrogen delivery data was insufficient to map out delivery rate as a function of temperature and capacity for the full-scale system. A more rigorous matrix of tests was performed to better define delivery capabilities. These studies were compared with 1-D and 2-D coupled multi-physics modeling results. The relative merits of these models are discussed along with opportunities for improved efficiency or reduced mass and volume.

Reimagining liquid transportation fuels : sunshine to petrol.

Two of the most daunting problems facing humankind in the twenty-first century are energy security and climate change. This report summarizes work accomplished towards addressing these problems through the execution of a Grand Challenge LDRD project (FY09-11). The vision of Sunshine to Petrol is captured in one deceptively simple chemical equation: Solar Energy + xCO{sub 2} + (x+1)H{sub 2}O {yields} C{sub x}H{sub 2x+2}(liquid fuel) + (1.5x+.5)O{sub 2} Practical implementation of this equation may seem far-fetched, since it effectively describes the use of solar energy to reverse combustion. However, it is also representative of the photosynthetic processes responsible for much of life on earth and, as such, summarizes the biomass approach to fuels production. It is our contention that an alternative approach, one that is not limited by efficiency of photosynthesis and more directly leads to a liquid fuel, is desirable. The development of a process that efficiently, cost effectively, and sustainably reenergizes thermodynamically spent feedstocks to create reactive fuel intermediates would be an unparalleled achievement and is the key challenge that must be surmounted to solve the intertwined problems of accelerating energy demand and climate change. We proposed that the direct thermochemical conversion of CO{sub 2} and H{sub 2}O to CO and H{sub 2}, which are the universal building blocks for synthetic fuels, serve as the basis for this revolutionary process. To realize this concept, we addressed complex chemical, materials science, and engineering problems associated with thermochemical heat engines and the crucial metal-oxide working-materials deployed therein. By projects end, we had demonstrated solar-driven conversion of CO{sub 2} to CO, a key energetic synthetic fuel intermediate, at 1.7% efficiency.