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Teruo Asakawa

Tokyo Electron

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Publication

Featured researches published by Teruo Asakawa.

Archive | 1997

Multi-chamber treatment system

Teruo Asakawa; Hiroaki Saeki

Archive | 1992

Transfer device for transferring a substrate

Tsutomu Hiroki; Teruo Asakawa

Archive | 1990

Handling apparatus for transferring carriers and a method of transferring carriers

Teruo Asakawa; Tetsu Ohsawa

Archive | 1998

Controlling gas in a multichamber processing system

Yoshiaki Sasaki; Teruo Asakawa

Archive | 1991

Stock unit for storing carriers

Teruo Asakawa

Archive | 1986

Two-dimensional positioning device

Teruo Asakawa

Archive | 1994

Transfer of material to be treated in treating device

Teruo Asakawa; Hiroaki Saeki; 弘明 佐伯; 輝雄 浅川

Archive | 1995

Apparatus and method for performing serial communication between master and slave devices

Teruo Asakawa; Akiyoshi Shoujima; Shigeru Ishizawa

Archive | 1997

Cassette transfer mechanism

Keiichi Matsushima; Teruo Asakawa

Archive | 1993

Carrier arm device and processing chamber collector using carrier arm device

Teruo Asakawa; Yoji Iizuka; Hiroaki Saeki; 弘明 佐伯; 輝雄 浅川; 洋二 飯塚

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Hiroaki Saeki

Tokyo Electron

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Junichi Inoue

Tokyo Electron

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Kazuhiko Sugiyama

Tokyo Electron

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Akira Machida

Tokyo Electron

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Makoto Yamamoto

Tokyo Electron

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Masaaki Kawaguchi

Tokyo Electron

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Yoji Iizuka

Tokyo Electron

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Hirofumi Yamaguchi

Tokyo Electron

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Hirokazu Narisawa

Tokyo Electron

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Keiichi Matsushima

Tokyo Electron

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