Teruyuki Matsui

Study for micro mobile machine with piezoelectric driving force actuator

A pin type actuator for a micro mechanical system was previously proposed by the authors. According to their work, it is composed of a piezoelectric bimorph plate and a contact pin to generate the driving force in X-Y direction with the vibrational mode control. The micro mobile machine, composed of these actuators, is capable of high speed movement in forward backward, rotational and spiral modes in the narrow pipe. The two dimensional analytical study for the actuator is done by means of FEM with a comparison of experimental results. It is proved that the optimum driving condition is given at the specific resonant mode depending on the pin vibration.

Mechanical analysis for micro mobile machine with piezoelectric element

Two types of micro mobile machines, of unimorph and stacked type piezoelectric element, respectively, have been investigated with respect to their basic performance and their mechanism. The geometrical size of both machines is less than 10 nm /spl times/ 10 mm, and their maximum speed on the horizontal plane and their climbable slope were found to be 100 mm/s and 15 degrees, respectively. Concerning the stacked type machine, various experiments have been conducted, and their results have been analyzed to understand the motion characteristics by solving boundary conditions of the elastic vibration equation. The vibration of the machine frames was observed by microscope to supplement the analytical data.

Position Sensing and Communication System Using Fluorescent Doped Plastic Fiber

Various telecommunication techniques using supersonic, electromagnetic or light waves have been developed for application to remotely controlled machine operation systems, especially for microsystems. A light wave communication technique using fluorescent light in an optical fiber was considered to be applicable for this purpose. The fundamental communication properties of fluorescent-doped plastic fiber have been examined to realize such a system in a specific narrow space. As a result, the detectable distance of 5m with resolution of 5.6 mm and a communication rate of approximately 500 kbps was obtained.

X-ray absorbing and mechanical properties of Au-C film for x-ray mask absorber

The X-ray absorption and mechanical properties of gold containing (Au-C) absorber formed on polyimide membrane for X-ray lithography mask have been investigated. The Au-C films were deposited by the same method as the previous investigators(Itoh et al.)1. (1) The compositional dependence of film stress before and after the exposure to SOR radiation has been observed. As a result, the stress in film changed monotonically ranging from compression (-3xlO8N/m2) to tension (l.2xlO8N/m2) with increasing Au content. Zero film stress was observed at Au atomic composition of 30%. Films originally being compressive (-l.5xlO7N/m2) were found to become tensile (l.OxlO8N/m2) after absorbing l500J/cm3 X-ray. This tendency differs from that of the BN film observed by King et al (2) X-ray absorption ratio in Au-C films were determined by measuring the amount of reduced thickness of resist on development after the exposure of X-ray through Au-C films with various composition ratios. It was found that it tended to fall from 92% to 68% with a decrease of Au atomic composition ratio from 0.85 to 0.11 at the constant absorber thickness of 0.5 pm. (3) Au-C films of various atomic composition ratio were patterned with EB lithography using the PMMA(Polyrnethylmethacrylate) resist and Reactive Ion Etching (RIE) with 02 gas. It was found that the etching rate of the film decreases with increasing Au content. The typical obtained value was approximately 100A/min at around 50% to 60% of Au composition and this was about 4 times higher than etching rate of pure Au. It is concluded that the Au-C absorber on polyimide membrane X-ray mask is practical for VLSI use for submicron pattern fabrication.