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Tetsuo Aoyama

Mitsubishi

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Publication

Featured researches published by Tetsuo Aoyama.

Archive | 1997

Cleaning liquid for semiconductor devices

Yoshimi Torii; Shunji Sasabe; Masayuki Kojima; Kazuhisa Usuami; Takafumi Tokunaga; Kazusato Hara; Yoshikazu Ohira; Tsuyoshi Matsui; Hideto Gotoh; Tetsuo Aoyama; Ryuji Hasemi; Hidetoshi Ikeda; Fukusaburo Ishihara; Ryuji Sotoaka

Archive | 1991

Active carbon materials, process for the preparation thereof and the use thereof

Hisaki Abe; Toshio Kondoh; Hideki Fukuda; Mayumi Takahashi; Tetsuo Aoyama; Masahiro Miyake

Archive | 2000

Resist stripping composition

Kazuto Ikemoto; Kojiro Abe; Tetsuo Aoyama

Archive | 1995

Stripping and cleaning agent for removing dry-etching and photoresist residues from a semiconductor substrate, and a method for forming a line pattern using the stripping and cleaning agent

Tetsuo Aoyama; Rieko Nakano; Koichiro Adachi

Archive | 1991

Surface treating agent for aluminum line pattern substrate

Tetsuo Aoyama; Mayumi Takahashi; Toshio Kondo; Hideki Fukuda

Archive | 2003

RESIST STRIPPING AGENT AND PROCESS OF PRODUCING SEMICONDUCTOR DEVICES USING THE SAME

Kazuto Ikemoto; Hisaki Abe; Taketo Maruyama; Tetsuo Aoyama

Archive | 2002

Photoresist stripper composition

Kazuto Ikemoto; Hisake Abe; Taketo Maruyama; Tetsuo Aoyama

Archive | 1997

Method of producing semiconductor device and rinse for cleaning semiconductor device

Mayumi Hada; Ryuji Hasemi; Hidetoshi Ikeda; Tetsuo Aoyama

Archive | 1984

Process for the preparation of carboxylic acid esters

Tetsuo Aoyama; Koichi Kida; Takako Uchiyama

Archive | 1992

Positive type photoresist developer

Tetsuo Aoyama; Susumu Kaneko

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Hideki Fukuda

Mitsubishi

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Hisaki Abe

Mitsubishi

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Mayumi Takahashi

Mitsubishi

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Taketo Maruyama

Mitsubishi

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Hidetoshi Ikeda

Mitsubishi

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Toshio Kondo

Mitsubishi

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Kazuto Ikemoto

Mitsubishi

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Masahiro Miyake

Mitsubishi

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Tetsuya Karita

Mitsubishi

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Eiji Shima

Mitsubishi

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