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internaltional ultrasonics symposium | 2014

Bandwidth-tunable SAW filter based on wafer-level transfer-integration of BaSrTiO 3 film for wireless LAN system using TV white space

Hideki Hirano; Tetsuo Samoto; Tetsuya Kimura; Masahiro Inaba; Ken-ya Hashimoto; Takeshi Matsumura; Kousuke Hikichi; Michio Kadota; Masayoshi Esashi; Shuji Tanaka

Cognitive radio technology on TV white spaces has been promoted worldwide to solve the spectrum shortage problem due to the explosive increase in personal communication systems such as smartphones. One of the most difficult challenges to utilize TV white space for personal use is the miniaturization of frequency and bandwidth tunable filters to select vacant TV channels. We have developed a one-chip bandwidth tunable filter by wafer-level transfer-integration of BaSrTiO3 (BST) film varactors and surface acoustic wave (SAW) resonators on a lithium tantalate wafer. The 3 dB bandwidth of the bandwidth tunable filter is tuned between 3.25 MHz and 6.25 MHz by applying 7V to the varactors, while the center frequency was constant at 1.004 GHz, as designed. These filters were installed in our developed prototype cognitive radio systems based on the IEEE802.11af draft and successfully demonstrated wireless LAN communication on TV frequency band.


internaltional ultrasonics symposium | 2014

Bandwidth-tunable filter consisting of SAW resonators and BaSrTiO 3 varactors directly fabricated on a LiTaO 3 wafer

Tetsuya Kimura; Hideaki Kobayashi; Yutaka Kishimoto; Hideyuki Kato; Masahiro Inaba; Ken-ya Hashimoto; Takeshi Matsumura; Hideki Hirano; Michio Kadota; Masayoshi Esashi; Shuji Tanaka

A prototyped bandwidth-tunable filter consisting of SAW resonators and BaSrTiO3 (BST) varactors is discussed in this paper. In general, the BST varactors require high deposition temperature (>600°C) in order to obtain good varactor performances. Thus special cared wafer integration process of BST varactors onto a 42°YX-LiTaO3 wafer was newly developed to prevent performance deterioration in SAW resonators. The bandwidth-tunable filter composed of ten pieces of both surface acoustic wave (SAW) resonators and BST varactors on the 42°YX-LiTaO3 substrate was successfully fabricated using the integration process. The measured center frequency of the filter is 1GHz, and the 3dB bandwidth is electrically tuned from 4.5 to 9.6MHz by adjusting a DC supply voltage from 0 to 10V.


internaltional ultrasonics symposium | 2013

Improvement of insertion loss of band pass tunable filter using SAW resonators and GaAs diode variable capacitors

Michio Kadota; Masayoshi Esashi; Shuji Tanaka; Yasuyuki Ida; Tetsuya Kimura

Tunable filters with a wide band tunable range are required for mobile phones with multi-bands and cognitive radio systems to simplify their circuits. Previously, the authors prototyped a band pass tunable filter, which continuously changes frequency from 1734 to 1844 MHz (6.1%) using surface acoustic wave (SAW) resonators and Si diode variable capacitors (varicap). However, the insertion loss was large compared with calculated one because the Q factor of the Si diode varicap was as low as 1 at 1.8 GHz. In this study, the authors improved the insertion loss of the tunable filter using GaAs varicaps. Compared with the Si varicap, the GaAs varicap has a higher Q factor of about 41 at 1.8 GHz. The authors fabricated a tunable filter composed of two SAW resonators and the GaAs varicaps instead of the Si varicaps on a printed circuit board (PCB). As a result, the insertion loss was drastically improved by 12 dB at the maximum, and the frequency characteristic approached the calculated one. The tunable range was also improved from 6.1% to 6.8%.


Archive | 2005

SENSOR FOR DETECTING SUBSTANCE IN LIQUID AND DEVICE FOR DETECTING SUBSTANCE IN LIQUID EMPLOYING SAME

Tetsuya Kimura; Koji Fujimoto; Kenjiro Okaguchi; Shinya Yamamoto; Ryoichi Morimoto; Toru Yabe


Archive | 2011

Elastic wave device and production method thereof

Tetsuya Kimura; Takashi Ogami; Katsuya Daimon


Journal of Micromechanics and Microengineering | 2013

Integration of BST varactors with surface acoustic wave device by film transfer technology for tunable RF filters

Hideki Hirano; Tetsuya Kimura; Ivoyl P. Koutsaroff; Michio Kadota; Ken-ya Hashimoto; Masayoshi Esashi; Shuji Tanaka


Archive | 2008

METHOD FOR MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE AND SURFACE ACOUSTIC WAVE DEVICE

Michio Kadota; Tetsuya Kimura


Archive | 2007

Sensor for detecting analyte in liquid and device for detecting analyte in liquid using the same

Tetsuya Kimura; Koji Fujimoto; Kenjiro Okaguchi; Shinya Yamamoto; Ryoichi Morimoto; Toru Yabe


Journal of the Acoustical Society of America | 2007

End surface reflection type surface acoustic wave device

Takeshi Nakao; Kenji Nishiyama; Tetsuya Kimura; Michio Kadota


Archive | 2007

Sensor for detecting substance in liquid and apparatus for detecting substance in liquid using the same

Tetsuya Kimura; Koji Fujimoto; Kenjiro Okaguchi

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