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Dive into the research topics where Tetsuya Nishizuka is active.

Publication


Featured researches published by Tetsuya Nishizuka.


Japanese Journal of Applied Physics | 1995

The electron charging effects of plasma on notch profile defects

Toshihisa Nozawa; Takashi Kinoshita; Tetsuya Nishizuka; Akira Narai; Takayoshi Inoue; Akimitsu Nakaue


Archive | 2004

Plasma processing system for treating a substrate

Lee Chen; Hiromitsu Kambara; Caiz Hong Tian; Tetsuya Nishizuka; Toshihisa Nozawa


Archive | 2013

Plasma etching method and plasma etching apparatus

Tetsuya Nishizuka; Masahiko Takahashi; Toshihisa Ozu


Archive | 1992

Plasma processing apparatus and its handling method

Takashi Kinoshita; Tetsuya Nishizuka; Toshihisa Nozawa; 隆 木下; 哲也 西塚; 俊久 野沢


Archive | 2011

PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

Toshihisa Nozawa; Masaru Sasaki; Jun Hashimoto; Shota Yoshimura; Toshihisa Ozu; Tetsuya Nishizuka


Archive | 1998

Surface treating method and cleaner

Yasushi Goto; Yukihiro Kusumi; Tetsuya Nishizuka; 裕史 後藤; 之博 楠見; 哲也 西塚


Archive | 2011

PLASMA ETCHING PROCESSING APPARATUS, PLASMA ETCHING PROCESSING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Jun Hashimoto; Tetsuya Nishizuka; Toshihisa Nozawa; Toshihisa Ozu; Masaru Sasaki; Shota Yoshimura; 勝 佐々木; 正太 吉村; 俊久 小津; 潤 橋本; 哲也 西塚; 俊久 野沢


Archive | 2009

ETCHING METHOD, ETCHING APPARATUS, COMPUTER PROGRAM AND STORAGE MEDIUM

Tetsuya Nishizuka


Archive | 2008

PLASMA PROCESSING APPARATUS AND METHOD FOR PLASMA-PROCESSING SEMICONDUCTOR SUBSTRATE

Hirokazu Udea; Tetsuya Nishizuka; Toshihisa Nozawa; Takaaki Matsuoka


Archive | 2008

CEILING PLATE AND PLASMA PROCESS APPARATUS

Caizhong Tian; Tetsuya Nishizuka; Kiyotaka Ishibashi; Toshihisa Nozawa

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