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Dive into the research topics where Thomas D. Raymond is active.

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Featured researches published by Thomas D. Raymond.


International Symposium on Optical Science and Technology | 2002

High-speed noninterferometric nanotopographic characterization of Si wafer surfaces

Thomas D. Raymond; Daniel R. Neal; Daniel M. Topa; Tony L. Schmitz

We present a high-speed silicon wafer metrology tool capable of resolving surface features in the nanometer height range. This tool uses a high performance Shack-Hartman sensor to analyze the wavefront of a beam of light reflected from a silicon wafer surface. By translating the wafer to analyze small portions of the wafer in each camera frame and then continuously piecing the frames together, we can retain sub-millimeter spatial resolution while rapidly analyzing large apertures. This tool is particularly effective for resolving features near the wafer edge. We will describe the measures required to obtain this level of resolution. We also compare data taken with this device to that taken with the National Institute of Standards and Technology X-ray optics Calibration Interferometer (XCALIBIR). Finally, we show measurements of a variety of typical and atypical 200 mm diameter wafer samples.


Characterization and Metrology for ULSI Technology | 2005

Optical Flatness Metrology for 300 mm Silicon Wafers

Ulf Griesmann; Quandou Wang; Thomas D. Raymond

The National Institute of Standards and Technology (NIST) is developing two interferometric methods for measuring the thickness, thickness variation, and flatness of free‐standing and chucked silicon wafers with diameters up to 300 mm. The “eXtremely accurate CALIBration InterferometeR” (XCALIBIR) is a precision phase measuring interferometer with an operating wavelength of 633 nm and a test beam of 300 mm diameter. XCALIBIR is used to evaluate the flatness of chucked wafers. NIST’s Infrared Interferometer (IR2) is a phase measuring interferometer that operates at 1.55 μm and is used to measure the thickness variation of free‐standing 300 mm silicon wafers.


Archive | 2007

Geometric measurement system and method of measuring a geometric characteristic of an object

Daniel R. Neal; Thomas D. Raymond; William Shea Powers


Archive | 2008

Systems and Methods for Measuring the Shape and Location of an object

Charles E. Campbell; Stephen W. Farrer; Daniel R. Neal; William Shea Powers; Thomas D. Raymond; James Copland


Archive | 2008

Systems and methods of phase diversity wavefront sensing

Thomas D. Raymond; Paul Pulaski; Stephen W. Farrer; Daniel R. Neal; Alan H. Greenaway; David M. Faichnie; Heather I. C. Dalgarno; Graham N. Craik


Archive | 2007

System and method for measuring corneal topography

Charles E. Campbell; Stephen W. Farrer; Daniel R. Neal; William Shea Powers; Thomas D. Raymond


Archive | 2010

Optical diagnosis using measurement sequence

Daniel R. Neal; Thomas D. Raymond; Leander Zickler


Archive | 2011

TREATMENT PLANNING METHOD AND SYSTEM FOR CONTROLLING LASER REFRACTIVE SURGERY

Thomas D. Raymond; Daniel R. Neal


Archive | 2009

Method of qualifying light spots for optical measurements and measurement instrument employing method of qualifying light spots

Thomas D. Raymond; John Dixson; Stephen W. Farrer; Wei Xiong; Daniel R. Neal


Archive | 2009

Systems and methods for measuring surface shape

Stephen W. Farrer; James Copland; Thomas D. Raymond; Wei Xiong

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Daniel R. Neal

Sandia National Laboratories

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Daniel R. Neal

Sandia National Laboratories

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Quandou Wang

National Institute of Standards and Technology

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Ulf Griesmann

National Institute of Standards and Technology

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Tony L. Schmitz

University of North Carolina at Charlotte

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