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Thomas Larson Greenberg

Seagate Technology

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Publication

Featured researches published by Thomas Larson Greenberg.

Archive | 2004

Cathode apparatus to selectively bias pallet during sputtering

Thomas Larson Greenberg; Paul Stephen McLeod

Archive | 2016

FILAMENT HOLDER FOR HOT CATHODE PECVD SOURCE

Samuel Lewis Tanaka; Christopher L. Platt; Thomas Larson Greenberg

Archive | 2013

Nano-scale void reduction

Justin Hwu; Gennady Gauzner; Thomas Larson Greenberg

Archive | 2008

Inline interlayer heater apparatus

Thomas Larson Greenberg; Thanh Thien Ha; Larry Douglas Monroe; Sam Vi Luong; Chinh Thien Dao; Hung Tuan Nguyen

Archive | 2006

Method & apparatus for cathode sputtering with uniform process gas distribution

Chang Bok Yi; Tatsuru Tanaka; Thomas Larson Greenberg; Christopher C. Neill

Archive | 2017

MAGNET ARRAY FOR PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Samuel Lewis Tanaka; Christopher L. Platt; Thomas Larson Greenberg

Archive | 2016

STORAGE MEDIUM VACUUM SPUTTER TOOL ADJUSTABLE IDLER

Samuel Lewis Tanaka; Chunwai Joseph Tong; Thomas Larson Greenberg

Archive | 2016

HELMHOLTZ COIL ASSISTED PECVD CARBON SOURCE

Christopher L. Platt; Zhaohui Fan; Samuel Lewis Tanaka; Chun Wai Joseph Tong; Thomas Larson Greenberg; Xiaoding Ma

Archive | 2015

Inductively Coupled Plasma Enhanced Chemical Vapor Deposition

Samuel Lewis Tanaka; Thomas Larson Greenberg; Christopher L. Platt; Joseph Tong

Archive | 2014

ETCHING SOURCE INSTALLABLE IN A STORAGE MEDIUM PROCESSING TOOL

Samuel Lewis Tanaka; Thomas Larson Greenberg

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Collaboration

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Samuel Lewis Tanaka

Seagate Technology

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Christopher L. Platt

Seagate Technology

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Chang Bok Yi

Seagate Technology

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Chinh Thien Dao

Seagate Technology

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Christopher C. Neill

Seagate Technology

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Chun Wai Joseph Tong

Seagate Technology

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Chunwai Joseph Tong

Seagate Technology

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Elizabeth Dawn Lawrence

Seagate Technology

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Gennady Gauzner

Seagate Technology

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Hung Tuan Nguyen

Seagate Technology

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