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Thomas Puthanangady

Saint-Gobain

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Publication

Featured researches published by Thomas Puthanangady.

Archive | 2009

Abrasive tool for use as a chemical mechanical planarization pad conditioner

Charles Dinh-Ngoc; Srinivasan Ramanath; Eric M. Schulz; Jianhui Wu; Thomas Puthanangady; Ramanujam Vedantham; Taewook Hwang

Archive | 2007

Conditioning tools and techniques for chemical mechanical planarization

Thomas Puthanangady; Taewook Hwang; Srinivasan Ramanath; Eric M. Schultz; J. Gary Baldoni; Sergej-Tomislav Buljan; Charles Dinh-Ngoc

Archive | 2010

Corrosion-resistant cmp conditioning tools and methods for making and using same

Jianhui Wu; Taewook Hwang; Ramanujam Vedantham; Charles Dinh-Ngoc; Thomas Puthanangady; Eric M. Schulz; Srinivasan Ramanath

Archive | 2008

Multifunction abrasive tool with hybrid bond

Rachana Upadhyay; Srinivasan Ramanath; Robert F. Corcoran; Thomas Puthanangady; Richard W. J. Hall; Lynn L. Harley

Archive | 2008

Optimized CMP Conditioner Design for Next Generation Oxide/Metal CMP

Taewook Hwang; J. Gary Baldoni; Thomas Puthanangady

Planarization / CMP Technology (ICPT), 2007 International Conference on | 2011

Optimized and Customized CMP Conditioner Design for Next Generation Oxide/Metal CMP

Taewook Hwang; Gary Baldoni; Rama Vedantham; Thomas Puthanangady

china semiconductor technology international conference | 2012

Green Flipper Dual-Sided CMP Conditioner

Taewook Hwang; Rama Vedantham; Thomas Puthanangady

Archive | 2010

Outils de conditionnement cmp résistants à la corrosion et leurs procédés de fabrication et d'utilisation

Jianhui Wu; Taewook Hwang; Ramanujam Vedantham; Charles Dinh-Ngoc; Thomas Puthanangady; Eric Schulz; Srinivasan Ramanath

Archive | 2009

Outil abrasif à utiliser comme conditionneur de tampon pour polissage mécano-chimique

Charles Dinh-Ngoc; Srinivasan Ramanath; Eric Schulz; Jianhui Wu; Thomas Puthanangady; Ramanujam Vedantham; Taewook Hwang

Archive | 2008

ABRASIVE TOOL FOR CMP PAD CONDITIONING.

Taewook Hwang; J. Gary Baldoni; Thomas Puthanangady

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Collaboration

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Taewook Hwang

Saint-Gobain

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Charles Dinh-Ngoc

Saint-Gobain

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J. Gary Baldoni

Saint-Gobain

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Jianhui Wu

Saint-Gobain

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Ramanujam Vedantham

Saint-Gobain

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Srinivasan Ramanath

Norton Abrasives

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Eric M. Schulz

Saint-Gobain

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Lynn L. Harley

Saint-Gobain

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Rachana Upadhyay

Saint-Gobain

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Rama Vedantham

Saint-Gobain

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