Thomas Scheiter | Researchain

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Featured researches published by Thomas Scheiter.

Archive | 2001

Electronic component and utilization of a guard structure contained therein

Heinz Opolka; Paul-Werner Von Basse; Thomas Scheiter; Rainer Grossmann; Christian Peters; Reinhard Fischbach; Andreas Gaymann; Thomas Rosteck; Domagoj Siprak; Thorsten Sasse; Reinhard Göllner; Justin Bierner; Michael Melzl; Klaus Hammer; Markus Witte

Archive | 1997

Process for manufacturing micromechanical functional elements

Thomas Scheiter; Christopher Hierold; Ulrich Dr. Näher

Archive | 1996

Micro-mechanical rotation rate sensor esp. for measuring angular speed

Ulrich Dr Naeher; Hergen Kapels; Christofer Hierold; Max Steger; Thomas Scheiter; Reinhold Prof. Dr. Noe

Archive | 1997

Gas pressure determining method for cavity of semiconductor micro-m-mechanical sensor chamber with deformable wall of semiconductor component

Thomas Scheiter; Hergen Kapels

Archive | 1997

Capacitance measuring sensor and selection circuit

Christofer Hierold; Reinhold Prof. Dr. Noe; Thomas Scheiter; Max Steger

Archive | 2000

Electronic component and use of a protective structure contained therein

Heinz Opolka; Basse Paul-Werner Von; Thomas Scheiter; Rainer Grossmann; Christian Peters; Reinhard Fischbach; Andreas Gaymann; Thomas Rosteck; Domagoj Siprak; Thorsten Sasse; Reinhard Göllner; Justin Bierner; Michael Melzl; Klaus Hammer; Markus Witte

Archive | 1996

Process for the active removal of silicum dioxide

Thomas Scheiter; Ulrich Dr. Näher; Christofer Hierold

Archive | 1999

SEMICONDUCTOR COMPONENT HAVING A PASSIVATION

Josef Willer; Basse Paul-Werner Von; Thomas Scheiter

Archive | 2001

Semiconductor component having double passivating layers formed of two passivating layers of different dielectric materials

Josef Willer; Paul-Werner Von Basse; Thomas Scheiter

Archive | 1999

Micromechanical component protected against environmental influences

Robert Aigner; Christofer Hierold; Hergen Kapels; Stefan Kolb; Dieter Maier-Schneider; Klaus-Guenter Oppermann; Hans-Joerg Timme; Thomas Scheiter; Wolfgang Werner

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