Timothy G. Leong

Tetherless thermobiochemically actuated microgrippers

We demonstrate mass-producible, tetherless microgrippers that can be remotely triggered by temperature and chemicals under biologically relevant conditions. The microgrippers use a self-contained actuation response, obviating the need for external tethers in operation. The grippers can be actuated en masse, even while spatially separated. We used the microgrippers to perform diverse functions, such as picking up a bead on a substrate and the removal of cells from tissue embedded at the end of a capillary (an in vitro biopsy).

Thin Film Stress Driven Self-Folding of Microstructured Containers**

Lithography, the workhorse of the microelectronics industry,is routinely used to fabricate micro and nanostructures in ahighly monodisperse manner, with high accuracy and preci-sion. However, one of the central limitationsof this technologyis that it is inherently two-dimensional (2D) as a result of thewafer-based fabrication paradigm. It is extremely challengingto fabricate three-dimensional (3D) patterned structures, letalone complex structures containing encapsulated objects, onthe sub-mm scale. Thus, the parallel fabrication of such struc-tures remains a major challenge that needs to be addressed.Some solutions have emerged that enable sub-mm-scalelithographic fabrication in 3D; these include techniques suchas wafer stacking,

Pick-and-Place Using Chemically Actuated Microgrippers

In this communication, we demonstrate the concept of single-use, chemically triggered, reversible tools in the form of mobile grippers that can be used to manipulate micro-objects. Both the closing and opening of the mobile grippers are triggered by chemicals, namely acetic acid (CH(3)COOH) and hydrogen peroxide (H(2)O(2)), respectively. The grippers close and open en masse based on chemically triggered, mechanical property changes within trilayer joints patterned within the gripper, and no external power is needed for operation. We describe the actuation of the gripper using a multilayer thin film model and demonstrate the utility of the gripper by picking-and-placing 200 microm diameter tubes and beads. Our pick-and-place microgripper is a first step toward the development of functional Micro Chemo-Mechanical Systems (MCMS), which are actuated by chemistry as opposed to electricity [as in Micro Electro-Mechanical Systems (MEMS)].

Self-loading lithographically structured microcontainers: 3D patterned, mobile microwells.

We demonstrate mass-producible, mobile, self-loading microcontainers that can be used to encapsulate both non-living and living objects, thus forming three-dimensionally patterned, mobile microwells.

Compactness determines the success of cube and octahedron self-assembly.

Nature utilizes self-assembly to fabricate structures on length scales ranging from the atomic to the macro scale. Self-assembly has emerged as a paradigm in engineering that enables the highly parallel fabrication of complex, and often three-dimensional, structures from basic building blocks. Although there have been several demonstrations of this self-assembly fabrication process, rules that govern a priori design, yield and defect tolerance remain unknown. In this paper, we have designed the first model experimental system for systematically analyzing the influence of geometry on the self-assembly of 200 and 500 µm cubes and octahedra from tethered, multi-component, two-dimensional (2D) nets. We examined the self-assembly of all eleven 2D nets that can fold into cubes and octahedra, and we observed striking correlations between the compactness of the nets and the success of the assembly. Two measures of compactness were used for the nets: the number of vertex or topological connections and the radius of gyration. The success of the self-assembly process was determined by measuring the yield and classifying the defects. Our observation of increased self-assembly success with decreased radius of gyration and increased topological connectivity resembles theoretical models that describe the role of compactness in protein folding. Because of the differences in size and scale between our system and the protein folding system, we postulate that this hypothesis may be more universal to self-assembling systems in general. Apart from being intellectually intriguing, the findings could enable the assembly of more complicated polyhedral structures (e.g. dodecahedra) by allowing a priori selection of a net that might self-assemble with high yields.

Self-Assembly Based on Chromium/Copper Bilayers

In this paper, we detail a strategy to self-assemble microstructures using chromium/copper (Cr/Cu) bilayers. Self-assembly was primarily driven by the intrinsic residual stresses of Cr within these films; in addition, the degree of bending could be controlled by changing the Cu film thickness and by introducing a third layer with either a flexible polymer or a rigid metal. We correlate the observed curvature of patterned self-assembled microstructures with those predicted by a published multilayer model. In the model, measured stress values (measured on the unpatterned films using a substrate curvature method) were utilized. We also investigated the role of two different sacrificial layers: 1) silicon and 2) water-soluble polyvinyl alcohol. Finally, a Taguchi design of experiments was performed to investigate the importance of the different layers in contributing to the stress-thickness product (the critical parameter that controls the curvature of the self-assembled microstructures) of the multilayers. This paper facilitates a deeper understanding of multilayer thin-film-based self-assembly and provides a framework to assemble complex microstructures, including tetherless self-actuating devices.

Hierarchical self-assembly of complex polyhedral microcontainers

The concept of self-assembly of a two-dimensional (2D) template to a three-dimensional (3D) structure has been suggested as a strategy to enable highly parallel fabrication of complex, patterned microstructures. We have previously studied the surface tension based self-assembly of patterned, microscale polyhedral containers (cubes, square pyramids and tetrahedral frusta). In this paper, we describe the observed hierarchical self-assembly of more complex, patterned polyhedral containers in the form of regular dodecahedra and octahedra. The hierarchical design methodology, combined with the use of self-correction mechanisms, was found to greatly reduce the propagation of self-assembly error that occurs in these more complex systems. It is a highly effective way to mass-produce patterned, complex 3D structures on the microscale and could also facilitate encapsulation of cargo in a parallel and cost-effective manner. Furthermore, the behavior that we have observed may be useful in the assembly of complex systems with large numbers of components.

Cell viability and noninvasive in vivo MRI tracking of 3D cell encapsulating self-assembled microcontainers.

Several molecular therapies require the implantation of cells that secrete biotherapeutic molecules and imaging the location and microenvironment of the cellular implant to ascertain its function. We demonstrate noninvasive in vivo magnetic resonance imaging (MRI) of self-assembled microcontainers that are capable of cell encapsulation. Negative contrast was obtained to discern the microcontainer with MRI; positive contrast was obtained in the complete absence of background signal. MRI on a clinical scanner highlights the translational nature of this research. The microcontainers were loaded with cells that were dispersed in an extracellular matrix, and implanted both subcutaneously and in human tumor xenografts in SCID mice. MRI was performed on the implants, and microcontainers retrieved postimplantation showed cell viability both within and proximal to the implant. The microcontainers are characterized by their small size, three dimensionality, controlled porosity, ease of parallel fabrication, chemical and mechanical stability, and noninvasive traceability in vivo.

Reconfigurable Microfluidics With Metallic Containers

We describe a microfluidic scheme based on remotely controlled self-assembled containers that allows spatio-temporal control over nanoliter-scale chemical reactions. We discuss finite-element simulations of the inductive coupling of radio-frequency radiation to the containers; this coupling enables remotely triggered release of chemical reactants. We demonstrate on-demand chemical release from stationary and mobile containers patterned with different porosities. We also explore reactions between chemicals released from two containers that form liquid products and deposit solid precipitates. We argue that these remotely controlled metallic containers provide an attractive platform for carrying out reconfigurable microfluidics ldquowithout channels.rdquo.

Forming low resistance nano-scale contacts using solder reflow

We describe the use of solder reflow on the 100 nanometer scale to form electrically conductive contacts. We fabricated nanowires using electrodeposition in nanoporous templates. We investigated the use of directed assembly and nanoscale soldering to integrate the nanowires with microfabricated bond pads, and measured the electrical characteristics of the soldered wires. The electrical resistance of a single nanowire on top of two adjacent contact pads dropped by an order of magnitude after solder reflow. The results in this paper demonstrate that it is possible to use solder films as thin as 100 nm to electrically bond nanocomponents to substrates with contact resistances as low as 5 /spl Omega/.