Timothy William Carr

Analysis of surface contaminants by plasma chromatography-mass spectroscopy☆

Abstract Plasma chromatography-mass spectroscopy is a relatively new ultra-sensitive analytical technique which permits the characterization of trace contaminants of the order of parts per billion and less. The technique is capable of detecting both positive and negative ions which are formed at atmospheric pressure as a result of ion-molecule reactions. The capabilities of the plasma chromatography-mass spectroscopy technique and its application to the analysis of trace levels of organic contaminants such as ethyl cellosolve acetate and trihydroxybenzophenone on wafer surfaces are discussed.

Analysis of Organic Surface Contaminants by Plasma Chromatography - Mass Spectroscopy and Raman Microprobe Techniques

A major problem in the analysis of surface contaminants is the identification and characterization of organics, especially of small areas. The frequently-used surface analytical techniques provide elemental information which is insufficient for organic analysis. Plasma chromotography-mass spectroscopy and the laser Raman microprobe technique are useful in characterizing organic surface contaminants. Both techniques are described and examples of application of the techniques are given.

Analysis of Headspace Vapor in Sealed Electronic Packages using Plasma Chromotography Mass Spectroscopy

Plasma chromatography/mass spectroscopy is a relatively new ultra sensitive analytical technique which permits the characterization of trace contaminants on the order of parts per billion and less. The technique is capable of detecting both positive and negative ions which are formed at atmospheric pressure as a result of ion-molecule reactions. The capabilities of the PC/MS technique and its application to the analysis of several organic, chlorine and bromine compounds in the headspace of sealed electronic packages is discussed.

Quantitative H2O Determination in Components using a Plasma Chromatograph-Mass Spectrometer

This report describes an experiment which forms the basic relationship allowing PC/MS to be used for the quantitative determination of the H20 content in a component, i.e., plastic package or metal header. The method to establish the quantitative relationships, analysis conditions, species monitored, and standards curve is described.