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Todd Lanier Hylton

Veeco

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Publication

Featured researches published by Todd Lanier Hylton.

Archive | 2001

Multi-channel optical filter and multiplexer formed from stacks of thin-film layers

David Alan Baldwin; Todd Lanier Hylton

Archive | 2002

System and method for making thin-film structures using a stepped profile mask

David Alan Baldwin; Todd Lanier Hylton

Archive | 2002

System and method for performing sputter deposition with multiple targets using independent ion and electron sources and independent target biasing with DC pulse signals

David Alan Baldwin; Todd Lanier Hylton

Archive | 2002

System and method for performing thin film deposition or chemical treatment using an energetic flux of neutral reactive molecular fragments, atoms or radicals

David Alan Baldwin; Todd Lanier Hylton

Archive | 1999

Apparatus for sputter deposition

James R. Kahn; Harold R. Kaufman; Viacheslav V. Zhurin; David Alan Baldwin; Todd Lanier Hylton

Archive | 2004

System and method for performing sputter etching using independent ion and electron sources and a substrate biased with an a-symmetric bi-polar DC pulse signal

David Alan Baldwin; Todd Lanier Hylton

Archive | 2001

System and method for controlling deposition thickness using a mask with a shadow that varies with respect to a target

David Alan Baldwin; Todd Lanier Hylton

Archive | 2002

System and method for controlling deposition thickness by synchronously varying a sputtering rate of a target with respect to a position of a rotating substrate

David Alan Baldwin; Todd Lanier Hylton

Archive | 2001

System and method for controlling deposition thickness using a mask with a shadow that varies along a radius of a substrate

David Alan Baldwin; Todd Lanier Hylton

Archive | 2001

System and method for performing sputter deposition using independent ion and electron sources and a target biased with an a-symmetric bi-polar DC pulse signal

David Alan Baldwin; Todd Lanier Hylton

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David Alan Baldwin

Veeco

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Harold R. Kaufman

Colorado State University

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James R. Kahn

Veeco

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Viacheslav V. Zhurin

Veeco

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