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Tomohiko Akatsuka

Ebara Corporation

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Publication

Featured researches published by Tomohiko Akatsuka.

Archive | 2003

Method and device for polishing

Yutaka Wada; Tomohiko Akatsuka; Tatsuya Sasaki

Archive | 2003

Polishing method and polishing liquid

Yutaka Wada; Tomohiko Akatsuka; Tatsuya Sasaki; Toshiya Hagihara

Archive | 2004

Polising method and device

Tomohiko Akatsuka; Yutaka Wada; Tatsuya Sasaki

Archive | 2004

Agent for increasing selection ratio of polishing rates

Toshiya Hagihara; Yutaka Wada; Tomohiko Akatsuka; Tatsuya Sasaki

Archive | 2003

Polishing rate selectivity enhancer

Tomohiko Akatsuka; Toshiya Hagiwara; Tatsuya Sasaki; Taketaka Wada; 達也 佐々木; 雄高 和田; 敏也 萩原; 朝彦 赤塚

Archive | 2003

Polishing method and polishing fluid

Yutaka Wada; Tomohiko Akatsuka; Tatsuya Sasaki; Toshiya Hagihara

Archive | 2013

Polishing composition and polishing method using the same, and dishing-reducer agent and method for reduction of dishing using the same

Mikikazu Shimizu; 幹和 清水; Tomohiko Akatsuka; 朝彦 赤塚; Kazuya Tsunoda; 和也 角田

Archive | 2004

Agent permettant d'accroitre la plage de selection de taux de polissage

Toshiya Hagihara; Yutaka Wada; Tomohiko Akatsuka; Tatsuya Sasaki

Archive | 2003

Polierverfahren und polierflüssigkeit Polishing process and polishing liquid

Tomohiko Akatsuka; Toshiya Hagihara; Tatsuya Sasaki; Yutaka Wada

Archive | 2003

Procede de polissage et fluide de polissage

Yutaka Wada; Tomohiko Akatsuka; Tatsuya Sasaki; Toshiya Hagihara

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Tatsuya Sasaki

Ebara Corporation

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Yutaka Wada

Ebara Corporation

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Toshiya Hagihara

Ebara Corporation

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