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Dive into the research topics where Tomohiko Okayama is active.

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Featured researches published by Tomohiko Okayama.


Archive | 2001

Processing system for substrate and method for producing semiconductor

Norinobu Akao; Satoru Ichimura; Yasunobu Nakayama; Tomohiko Okayama; Kazunori Suzuki; Kazunori Tsutsuguchi; Akio Yoshino; 恭伸 中山; 晃生 吉野; 智彦 岡山; 悟 市村; 和典 筒口; 徳信 赤尾; 千典 鈴木


Archive | 2004

CATALYST CVD EQUIPMENT

Nobuhiro Ando; Shin Asari; Tomohiko Okayama; Shuji Osono; Kazuya Saito; Hideo Tsuboi; 秀夫 坪井; 修司 大園; 暢弘 安藤; 智彦 岡山; 斎藤 一也; 伸 浅利


Archive | 2007

Heating device, and substrate-treating device

Kenji Eto; Yosuke Jinbo; Shoji Kubo; Tomohiko Okayama; Teiji Wakamatsu; 昭二 久保; 智彦 岡山; 謙次 江藤; 洋介 神保; 貞次 若松


Archive | 1996

Method for controlling pressure of vacuum treatment chamber

Norinobu Akao; Tomohiko Okayama; 智彦 岡山; 徳信 赤尾


Archive | 1994

Detachable structure of substrate push-up pin

Tomohiko Okayama; 智彦 岡山


Archive | 2010

Heating processing device

Hitoshi Ikeda; Tomohiko Okayama; Yashinori Mesaki; Kano Morioka; Koichi Matsumoto


Archive | 2011

Organic light emitting device manufacturing device and its manufacturing method

Yoshinori Onishi; 芳紀 大西; Fumio Nakamura; 文生 中村; Hitoshi Ikeda; 均 池田; Yoshiaki Yamamoto; 良明 山本; Tomohiko Okayama; 智彦 岡山


Archive | 2009

Catalytic chemical vapor deposition device

Hideyuki Ogata; Shuichi Okano; Tomohiko Okayama; Shuji Osono; Masaki Shima; 修司 大園; 英之 小形; 智彦 岡山; 秀一 岡野; 正樹 島


Archive | 2007

Vacuum chamber, load lock chamber, and processing apparatus

Koichi Matsumoto; Yoshinori Mesaki; Kazu Morioka; Tomohiko Okayama; 智彦 岡山; 浩一 松本; 和 森岡; 芳則 目崎


Archive | 2007

真空チャンバ、ロードロックチャンバ、及び処理装置

Koichi Matsumoto; Yoshinori Mesaki; Kazu Morioka; Tomohiko Okayama; 智彦 岡山; 浩一 松本; 和 森岡; 芳則 目崎

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