Tomoyuki Tobita

Design method for sensing body of differential pressure transmitter using silicon diaphragm-type pressure sensor

This paper describes a design method for the three-diaphragm-type sensing body of a differential pressure transmitter. This sensing body protects the silicon diaphragm-type pressure sensor from over-pressure. The design method includes information on how to decide the stiffness of each metal diaphragm and the liquid quantity needed to fill the sensing body. The differential pressure transmitter, with significant stabilities, has zero-influence errors of static pressure and over-pressure of less than -0.2% and /spl plusmn/0.1%, respectively, and is obtained at a measuring span of 25 kPa and a line pressure of 15 MPa. >

Designing method for sensing body mechanism of differential pressure transmitter using silicon diaphragm type pressure sensor

This paper describes a designing method of the three-diaphragm type sensing body of differential pressure transmitter for protecting silicon diaphragm type pressure sensor from an over-pressure. This method includes how to decide each stiffness of three metal diaphragms and liquid quantity filled in the sensing body. This method is applied to differential pressure transmitters with measuring ranges from 0-0.6 kPa to 0-400 kPa. As a result, transmitters with significant stabilities are obtained: a zero and span influence of a static pressure and an over-pressure are less than 0.2% at a line pressure of 15 MPa.<<ETX>>

Development of very small differential pressure transmitter

This paper describes development of very small intelligent differential pressure transmitter using semiconductor multiple pressure sensor. The study focuses on the structural design, system and compensation algorithms to achieve the compact. A very small semiconductor pressure sensor based on piezoresistive gauge placed in the small sensing body converts three quantities to electric signal. The structural and response analysis of the sensing body to achieve the compact has been studied. The microprocessing unit compensates the output of transmitter of refering the three signal to calibration data and does its self-diagnosis included the damage of sensor and sensing body.<<ETX>>