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Featured researches published by Toru Hayase.


Key Engineering Materials | 2006

Influence of Grain Boundary Properties on Microcracking of AlN in Sliding Test

Yoshimasa Kobayashi; Toru Hayase; Naohito Yamada

Grain boundary microcracking in sliding test using a silicon pin was evaluated on several kinds of AlN to investigate the behavior of damage generation and the influence of material properties on it. The grain boundary fracture toughness (KIC gb ) was estimated from a percentage of the intergranular fracture as a grain boundary property for each specimen. KIC gb was greatly influensed by an amount and kinds of additives. After the sliding test, silicon debris accumulation and grain boundary microcracking of AlN were observed at the wear traces on the surface of AlN. The density of grain boundary microcracks increased linearly with increasing the contact load. Empirical relationship indicated that its density depended on KIC gb and the AlN grain size, and decreased mainly with increasing KIC gb. The density of grain boundary microcracks greatly degreased at the KIC gbvalue above 1.9 (MPa·m1/2).


Archive | 2004

Aluminum nitride materials and members for use in the production of semiconductors

Yoshimasa Kobayashi; Toru Hayase; Naomi Teratani; Jun Yoshikawa; Naohito Yamada


Archive | 2010

ALUMINA SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER

Naomi Teratani; Toru Hayase; Yuji Katsuda; Masahiro Kida


Archive | 2005

Method for manufacturing aluminum nitride single crystal

Yoshimasa Kobayashi; Toru Hayase; Naohito Yamada


Archive | 2004

Aluminum nitride sintered body and method of evaluation for the same

Yoshimasa Kobayashi; Toru Hayase; Naohito Yamada


Archive | 2004

Aluminum nitride-based material and component for apparatus to manufacture semiconductor

Toru Hayase; Yoshimasa Kobayashi; Naomi Teratani; Naohito Yamada; Jun Yoshikawa; 直美 寺谷; 義政 小林; 直仁 山田; 徹 早瀬


Archive | 2012

CORROSION-RESISTANT MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING THE SAME

Morimichi Watanabe; Yuji Katsuda; Toru Hayase; Asumi Jindo


Archive | 2009

ALUMINUM NITRIDE SINTERED PRODUCT, METHOD FOR PRODUCING THE SAME, AND ELECTROSTATIC CHUCK INCLUDING THE SAME

Naomi Teratani; Toru Hayase; Yuji Katsuda


Archive | 2005

Method for manufacturing aluminium nitride single crystal

Yoshimasa Kobayashi; Toru Hayase; Naohito Yamada


Archive | 2004

Aluminum nitride sintered compact, method of manufacturing aluminum nitride and method of evaluating aluminum nitride

Toru Hayase; Yoshimasa Kobayashi; Naohito Yamada; 義政 小林; 直仁 山田; 徹 早瀬

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Yoshimasa Kobayashi

Nagaoka University of Technology

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