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Toshiaki Hasegawa

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Publication

Featured researches published by Toshiaki Hasegawa.

Archive | 1995

Manufacture of insulation film by means of chemical vapor phase epitaxy

Toshiaki Hasegawa; 利昭 長谷川

Archive | 1998

Semiconductor device having film of low permittivity and manufacture thereof

Toshiaki Hasegawa; So Nakayama; 創 中山; 利昭 長谷川

Archive | 1997

METHOD OF FORMING INTER-LAYER DIELECTRIC

Toshiaki Hasegawa; 利昭 長谷川

Archive | 1998

FORMING METHOD FOR METAL-BASED FILM AND MANUFACTURE OF ELECTRONIC DEVICE

Toshiaki Hasegawa; 利昭 長谷川

Archive | 1994

Formation of tantalum-containing high dielectric film

Toshiaki Hasegawa; 利昭 長谷川

Archive | 1992

FILM FORMING EQUIPMENT

Toshiaki Hasegawa; 利昭 長谷川

Archive | 1995

Formation of dielectric film

Toshiaki Hasegawa; 利昭 長谷川

Archive | 1991

Cvd apparatus and thin-film formation using the apparatus

Toshiaki Hasegawa; 利昭 長谷川

Archive | 1995

Silicon-based oxide film containing fluorine and its preparation

Toshiaki Hasegawa; 利昭 長谷川

Archive | 1991

Vacuum cvd device

Toshiaki Hasegawa; 利昭 長谷川

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