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Dive into the research topics where Toshio Ohi is active.

Publication


Featured researches published by Toshio Ohi.


Archive | 2002

Process for producing perfluorocarbons and use thereof

Hiromoto Ohno; Toshio Ohi


Archive | 2000

Catalytic decomposition of perfluoro-compound

Tetsuo Nakajo; Masatoshi Hotta; Hiromoto Ohno; Toshio Ohi; Yusaku Takita


Archive | 1996

Process for producing perfluorocarbon

Hiromoto Ohno; Tetsuo Nakajo; Tatsuharu Arai; Toshio Ohi


Archive | 2002

Production and use of hexafluoroethane

Hiromoto Ohno; Toshio Ohi


Archive | 2001

Measuring method for concentration of halogen and fluorine compound, measuring equipment thereof and manufacturing method of halogen compound

Hiromoto Ohno; Toshio Ohi; Kazunari Kaga; Ryuichi Tachi; Itsuaki Matsuda


Archive | 2001

Cleaning gas for semiconductor production equipment

Hiromoto Ohno; Toshio Ohi; Shuji Yoshida; Manabu Ohhira; Koutarou Tanaka


Archive | 2001

Production and use of octafluoropropane

Hiromoto Ohno; Toshio Ohi


Archive | 2000

Method for purifying hexafluoroethane

Hiromoto Ohno; Tetsuo Nakajo; Toshio Ohi; Tatsuharu Arai


Archive | 2007

Process for producing high-purity hexafluoropropylene and cleaning gas

Hiromoto Ohno; Toshio Ohi


Archive | 2001

Process for producing hexafluoroethane and use thereof

Hiromoto Ohno; Kazunari Kaga; Toshio Ohi

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