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Dive into the research topics where Toshio Uehara is active.

Publication


Featured researches published by Toshio Uehara.


Archive | 2002

Sensor for non-contacting electrostatic detector

Jerzy Kieres; Toshio Uehara; Bruce T. Williams


Archive | 1998

Electrostatic force detector with cantilever for an electrostatic force microscope

Akiyoshi Itoh; Katsuji Nakagawa; Manabu Tani; Toshio Uehara; Bruce T. Williams


Archive | 1999

Electrostatic force detector with cantilever and shield for an electrostatic force microscope

Toshio Uehara; Akiyoshi Itoh; Katsuji Nakagawa; Manabu Tani; Bruce T. Williams


Archive | 2002

Platen for electrostatic wafer clamping apparatus

Hiroaki Yanagida; Hideaki Matsubara; Yoshiki Okuhara; Shoji Aoki; Naoki Kawashima; Bruce T. Williams; Toshio Uehara


Archive | 1999

Electrostatic force detector with cantilever and shield

Toshio Uehara; Bruce T. Williams; Akiyoshi Itoh; Katsuji Nakagawa; Manabu Tani


Archive | 2012

Method and device for moving a sensor close to a surface

Akiyoshi Itoh; Katsuji Nakagawa; Yoshito Ashizawa; Jumpei Higashio; Toshio Uehara; Bruce T. Williams; Tomoharu Saito


Archive | 2014

Electrostatic chuck dielectric layer and electrostatic chuck

Kota Tsutsumi; 幸太 堤; Mitsuyoshi Nagano; 光芳 永野; Teruki Tamagawa; 晃樹 玉川; Norio Shiraiwa; 則雄 白岩; Tadayoshi Yoshikawa; 忠義 吉川; Yoshiki Saito; 美喜 齋藤; Toshio Uehara; 利夫 上原; Hideaki Matsubara; 秀彰 松原; Tetsushi Matsuda; 哲志 松田


Archive | 2013

Dielectric layer for electrostatic chuck and electrostatic chuck

Kouta Tsutsumi; Mitsuyoshi Nagano; Koki Tamagawa; Norio Shiraiwa; Tadayoshi Yoshikawa; Miki Saito; Toshio Uehara; Hideaki Matsubara; Tetsushi Matsuda


Archive | 2003

Verbesserte platte für eine elektrostatische wafer-klemmvorrichtung

Hiroaki Yanagida; Hideaki Matsubara; Yoshiki Okuhara; Shoji Aoki; Naoki Kawashima; Bruce T. Williams; Toshio Uehara


Archive | 1999

Elektrostatischer kraftmessfühler mit ausleger und abschirmung Electrostatic force-measuring sensor with boom and shielding

Akiyoshi Itoh; Katsuji Nakagawa; Manabu Tani; Toshio Uehara; T. Bruce Williams

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Yoshiki Okuhara

Nagaoka University of Technology

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