Toshio Uehara | Researchain

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Featured researches published by Toshio Uehara.

Archive | 2002

Sensor for non-contacting electrostatic detector

Jerzy Kieres; Toshio Uehara; Bruce T. Williams

Archive | 1998

Electrostatic force detector with cantilever for an electrostatic force microscope

Akiyoshi Itoh; Katsuji Nakagawa; Manabu Tani; Toshio Uehara; Bruce T. Williams

Archive | 1999

Electrostatic force detector with cantilever and shield for an electrostatic force microscope

Toshio Uehara; Akiyoshi Itoh; Katsuji Nakagawa; Manabu Tani; Bruce T. Williams

Archive | 2002

Platen for electrostatic wafer clamping apparatus

Hiroaki Yanagida; Hideaki Matsubara; Yoshiki Okuhara; Shoji Aoki; Naoki Kawashima; Bruce T. Williams; Toshio Uehara

Archive | 1999

Electrostatic force detector with cantilever and shield

Toshio Uehara; Bruce T. Williams; Akiyoshi Itoh; Katsuji Nakagawa; Manabu Tani

Archive | 2012

Method and device for moving a sensor close to a surface

Akiyoshi Itoh; Katsuji Nakagawa; Yoshito Ashizawa; Jumpei Higashio; Toshio Uehara; Bruce T. Williams; Tomoharu Saito

Archive | 2014

Electrostatic chuck dielectric layer and electrostatic chuck

Kota Tsutsumi; 幸太堤; Mitsuyoshi Nagano; 光芳永野; Teruki Tamagawa; 晃樹玉川; Norio Shiraiwa; 則雄白岩; Tadayoshi Yoshikawa; 忠義吉川; Yoshiki Saito; 美喜齋藤; Toshio Uehara; 利夫上原; Hideaki Matsubara; 秀彰松原; Tetsushi Matsuda; 哲志松田

Archive | 2013