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Dive into the research topics where Tsugai Masahiro is active.

Publication


Featured researches published by Tsugai Masahiro.


Archive | 2001

INERTIA FORCE SENSOR AND METHOD OF MANUFACTURING THE SAME

Tsugai Masahiro; Hirata Yoshiaki


Archive | 1999

VIBRATING ANGULAR VELOCITY SENSOR

Tsugai Masahiro; Konno Nobuaki; Hirata Yoshiaki


Archive | 2004

ELECTROMAGNETIC MIRROR DEVICE AND ITS MANUFACTURING METHOD

Konno Nobuaki; Tsugai Masahiro


Archive | 1999

Capacitive detection circuit for capacitive sensor, e.g. to measure pressure or acceleration

Tsugai Masahiro


Archive | 2007

INERTIAL FORCE SENSOR AND MANUFACTURING METHOD OF THE SAME

Hirata Yoshiaki; Tsugai Masahiro; Yamaguchi Yasuo; Otani Hiroshi


Archive | 2000

MANUFACTURE OF DEVICE

Hirata Yoshiaki; Konno Nobuaki; Tsugai Masahiro


Archive | 1999

Production of a device for manufacturing semiconductors comprises forming a protective layer on a substrate, joining to a further substrate and alternately forming a film with high molecular weight and etching

Hirata Yoshiaki; Konno Nobuaki; Tsugai Masahiro


Archive | 2000

Winkelgeschwindigkeitssensor vom Vibrationstyp

Tsugai Masahiro; Konno Nobuaki; Hirata Yoshiaki


Archive | 2000

Pressure switch for automobiles, industrial machines, has sealing structure arranged between two opposing surfaces of opposite substrate to hermetically seal airtight chamber from atmosphere

Yoshikawa Eiji; Tsugai Masahiro; Araki Toru


Archive | 1999

Mikrospiegelvorrichtung und Herstellungsverfahren

Tsugai Masahiro; Konno Nobuaki; Fujita Hiroyuki; Mita Makoto; Toshiyoshi Hiroshi; Mita Yoshio

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