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Uchiyama Isao

East Tennessee State University

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Publication

Featured researches published by Uchiyama Isao.

Archive | 2000

EVALUATION METHOD FOR SILICON WAFER AND SILICON WAFER

Uchiyama Isao; Kobayashi Takeshi; Takamatsu Hiroyuki

Archive | 1996

METHOD FOR STORING SEMICONDUCTOR SILICON WAFER

Nakano Masami; Uchiyama Isao; Takamatsu Hiroyuki

Archive | 1993

AUTOMATIC WAFER CLEANING DEVICE

Kudo Hideo; Uchiyama Isao; Tanakajima Takashi; Kimura Yoshiharu; Suzuki Morie

Archive | 1998

METHOD FOR PURIFYING ALKALI SOLUTION AND METHOD FOR ETCHING SEMICONDUCTOR WAFER

Uchiyama Isao; Takamatsu Hiroyuki; Ajito Toshio

Archive | 1993

METHOD AND APPARATUS FOR ERECTING WAFER

Kudo Hideo; Uchiyama Isao; Tanakajima Takashi; Kimura Yoshiharu; Suzuki Morie

Archive | 1996

CLEANING METHOD FOR SEMICONDUCTOR SILICON WAFER

Nakano Masami; Uchiyama Isao; Takamatsu Hiroyuki

Archive | 2002

Method of etching semiconductor wafers

Nakano Masami; Uchiyama Isao; Ajito Toshio; Kudo Hideo

Archive | 2000

Method of purifying alkaline solution to improve the etching of semiconductor wafers

Uchiyama Isao; Ajito Toshio; Takamatsu Hiroyuki

Archive | 1999

Reinigungsvorrichtung mit Bürsten und diese verwendendes Reinigungssystem für scheibenförmige Gegenstände

Uchiyama Isao; Nakano Masami; Takamatu Hiroyuki; Suzuki Morie

Archive | 1999

Reinigungsbehälter für Halbleitersubstrate

Kudo Hideo; Uchiyama Isao

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Collaboration

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Takamatsu Hiroyuki

East Tennessee State University

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Nakano Masami

East Tennessee State University

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Suzuki Morie

East Tennessee State University

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Hasegawa Fumihiko

East Tennessee State University

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