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Ueda Tetsuya

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Publication

Featured researches published by Ueda Tetsuya.

Archive | 1989

MICROWAVE PLASMA FILM DEPOSITING DEVICE

Suzuki Naoki; Ueda Tetsuya; Yano Kosaku

Archive | 1993

Forming method for thin film

Tanimura Shoichi; Yano Kosaku; Fujita Tsutomu; Ueda Tetsuya; Yamamoto Hiroshi; Kakiuchi Takao

Archive | 1990

PLASMA GENERATOR AND THIN FILM ACCUMULATING DEVICE

Ueda Tetsuya; Yano Kosaku; Suzuki Naoki

Archive | 1994

DEPOSITION OF THIN FILM AND FABRICATION OF SEMICONDUCTOR DEVICE

Yano Kosaku; Endo Masataka; Terai Yuka; Nomura Noboru; Murakami Tomoyasu; Ueda Tetsuya; Ueda Satoshi

Archive | 1994

SEMICONDUCTOR DEVICE AND ITS MANUFACTURE, AND SEMICONDUCTOR MANUFACTURING EQUIPMENT

Murakami Tomoyasu; Yano Kosaku; Ueda Tetsuya

Archive | 1997

FORMATION METHOD WIRING AND SEMICONDUCTOR ELEMENT

Ueda Tetsuya; Ueda Satoshi

Archive | 1997

DESIGNING METHOD FOR DUMMY PATTERN

Ueda Satoshi; Ueda Tetsuya

Archive | 1990

APPARATUS AND METHOD FOR THIN FILM DEPOSITION

Ueda Tetsuya; Yano Kosaku

Archive | 1994

FORMATION OF METAL WIRING

Ueda Tetsuya; Yano Kosaku; Murakami Tomoyasu; Yamanaka Michinari; Hirao Hideji; Nomura Noboru

Archive | 1989

DEPOSITION SYSTEM FOR THIN-FILM

Ueda Tetsuya; Yano Kosaku

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Collaboration

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Ueda Satoshi

Panasonic

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Nomura Noboru

Panasonic

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