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Ulf Hackius

SUSS MicroTec

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Publication

Featured researches published by Ulf Hackius.

Archive | 2007

Method for measurement of a device under test

Axel Schmidt; Frank Fehrmann; Ulf Hackius; Stojan Kanev; Steffen Laube; Jörg Dr. Kiesewetter

Archive | 2006

PROCESS FOR THE INSPECTION OF A VARIETY OF REPETITIVE STRUCTURES

Michael Teich; Juliane Busch; Axel Becker; Ralf Keller; Jörg Dr. Kiesewetter; Ulf Hackius

Archive | 2011

Modular scanner, and method for operating same

Stojan Kanev; Botho Hirschfeld; Axel Becker; Ulf Hackius

Archive | 2010

Verfahren zur prüfung elektronischer bauelemente einer wiederholstruktur unter definierten thermischen bedingungen

Stojan Kanev; Frank Fehrmann; Jens Fiedler; Ulf Hackius; Claus Dietrich; Jörg Kiesewetter

Archive | 2010

Method for inspecting structures of test substrates

Michael Teich; Frank Fehrmann; Thomas Thärigen; Jens Fiedler; Ulf Hackius

Archive | 2010

Modularer Prober und Verfahren zu dessen Betrieb Modular Prober and method for its operation

Axel Becker; Ulf Hackius; Hirschfeld Botho; Kanev Stojan

Archive | 2008

Vorrichtung und Verfahren zur Steuerung einer Bewegungseinrichtung Apparatus and method for controlling a movement device

Juliane Busch; Frank Fehrmann; Ulf Hackius; Ralf Keller

Archive | 2008

Device and method for controlling motion device

Juliane Busch; Frank Fehrmann; Ulf Hackius; Ralf Keller; ウルフ・ハッキウス; フランク・フェールマン; ユリアーネ・ブッシュ; ラルフ・ケラー

Archive | 2008

A method of measuring a semiconductor substrate

Frank Fehrmann; Ulf Hackius; Stojan Kanev; Jörg Dr. Kiesewetter; Steffen Laube; Axel Schmidt

Archive | 2008

Multilevel-image acquisition focusing arrangement for use in prober, has lens provided on surface of object independent of drive of microscope in focus plane, and another focus plane lying in height of tip and focusing lens focusing system

Teich, Michael, Dipl.-Phys.; Ulf Hackius; Juliane Busch; Jörg Kiesewetter; Axel Becker

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Frank Fehrmann

SUSS MicroTec

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Juliane Busch

SUSS MicroTec

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Ralf Keller

SUSS MicroTec

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Axel Becker

SUSS MicroTec

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Michael Teich

SUSS MicroTec

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Jörg Dr. Kiesewetter

Cascade Microtech

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Axel Schmidt

SUSS MicroTec

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Steffen Laube

SUSS MicroTec

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Stojan Kanev

SUSS MicroTec

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Jörg Kiesewetter

SUSS MicroTec

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