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Uwe Schnakenberg

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Archive | 1989

Method for manufacturing a control plate for a lithographic device

Wolfgang Benecke; Uwe Schnakenberg; Burkhard Lischke

Archive | 1990

Apparatus for measuring mechanical forces and force actions

B. Wagner; Wolfgang Benecke; Werner Riethmüller; Uwe Schnakenberg

Archive | 1989

Process for producing a beam-forming aperture for a lithography apparatus.

Burkhard Lischke; Wolfgang Benecke; Uwe Schnakenberg

Archive | 1989

Method for producing beam-shaping diaphragms for lithographic devices

Wolfgang Benecke; Uwe Schnakenberg; Burkhard Lischke

Archive | 1989

Process for the manufacture of a steering plate for a lithography apparatus

Burkhard Lischke; Wolfgang Benecke; Uwe Schnakenberg

Archive | 1990

Device for measuring mechanical forces and dynamic effects

B. Wagner; Wolfgang Benecke; Werner Riethmüller; Uwe Schnakenberg

Archive | 1989

Process for anisotropic etching of semiconductor materials using an electrochemical etch-stop

Uwe Schnakenberg; W. Benecke; Bernd Löchel; Martin Willmann; Jiri Marek; Günther Findler

Journal of Pediatric Health Care | 1989

Miniaturized Accelerometers Based on Silicon Micromachining Techniques

Wolfgang Benecke; Werner Riethmüller; Uwe Schnakenberg; Bernd M. Wagner

Archive | 1992

Substrate effects in superconducting tunnel junction detectors

S. Lemke; F. Hebrank; R. J. Gross; R. P. Huebener; Th. Weimann; R. Poepel; Jens C. Niemeyer; Uwe Schnakenberg; Wolfgang Benecke

Archive | 1989

Vorrichtung zur messung mechanischer kraefte und kraftwirkungen A device for measuring mechanical forces and force effects

B. Wagner; W. Benecke; Werner Dipl Ing Riethmueller; Uwe Schnakenberg

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