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Vadim Boguslavskiy

Veeco

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Publication

Featured researches published by Vadim Boguslavskiy.

Archive | 2008

Wafer carrier with hub

Vadim Boguslavskiy; Alexander I. Gurary

Archive | 2012

HEATED WAFER CARRIER PROFILING

Vadim Boguslavskiy; Joshua Mangum; Matthew King; Earl Marcelo; Eric A. Armour; Alexander I. Gurary; William E. Quinn; Guray Tas

Archive | 2010

PROCESSING METHODS AND APPARATUS WITH TEMPERATURE DISTRIBUTION CONTROL

Alexander I. Gurary; Mikhail Belousov; Vadim Boguslavskiy; Bojan Mitrovic

Archive | 2011

METHODS AND SYSTEMS FOR IN-SITU PYROMETER CALIBRATION

Alexander I. Gurary; Vadim Boguslavskiy; Sandeep Krishnan; Matthew King

Archive | 2004

System and method for increasing the emissivity of a material

Vadim Boguslavskiy; Alexander I. Gurary

Archive | 2013

Keyed wafer carrier

Sandeep Krishnan; Keng Moy; Alexander I. Gurary; Matthew King; Vadim Boguslavskiy; Steven Krommenhoek

Archive | 2013

Multi-keyed wafer carrier

Sandeep Krishnan; Keng Moy; Alexander I. Gurary; Matthew King; Vadim Boguslavskiy; Steven Krommenhoek

Archive | 2012

TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT

Arno Plankensteiner; Christian Feist; Vadim Boguslavskiy; Alexander I. Gurary; Chenghung Paul Chang

Archive | 2015

Supporting system for a heating element

Vadim Boguslavskiy; Arno Plankensteiner

Archive | 2014

Multi-keyed spindle

Sandeep Krishnan; Keng Moy; Alexander I. Gurary; Matthew King; Vadim Boguslavskiy; Steven Krommenhoek

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Collaboration

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Alexander I. Gurary

Veeco

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Matthew King

Veeco

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Keng Moy

Veeco

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Sandeep Krishnan

Veeco

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Steven Krommenhoek

Veeco

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Eric A. Armour

Veeco

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Arno Plankensteiner

Plansee SE

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Bojan Mitrovic

Veeco

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Chenghung Paul Chang

Veeco

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Christian Feist

Veeco

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