Vasilisa Veligura

Helium ion microscopy

Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated insulating nano-structures but also allows to create these features. The latter can be achieved using resists or material removal due to sputtering. The close to free-form sculpting of structures over several length scales has been made possible by the extension of the method to other gases such as Neon. A brief introduction of the underlying physics as well as a broad review of the applicability of the method is presented in this review.

Digging gold: keV He(+) ion interaction with Au.

Summary Helium ion microscopy (HIM) was used to investigate the interaction of a focused He+ ion beam with energies of several tens of kiloelectronvolts with metals. HIM is usually applied for the visualization of materials with extreme surface sensitivity and resolution. However, the use of high ion fluences can lead to significant sample modifications. We have characterized the changes caused by a focused He+ ion beam at normal incidence to the Au{111} surface as a function of ion fluence and energy. Under the influence of the beam a periodic surface nanopattern develops. The periodicity of the pattern shows a power-law dependence on the ion fluence. Simultaneously, helium implantation occurs. Depending on the fluence and primary energy, porous nanostructures or large blisters form on the sample surface. The growth of the helium bubbles responsible for this effect is discussed.

Channeling in helium ion microscopy: Mapping of crystal orientation

Summary Background: The unique surface sensitivity and the high resolution that can be achieved with helium ion microscopy make it a competitive technique for modern materials characterization. As in other techniques that make use of a charged particle beam, channeling through the crystal structure of the bulk of the material can occur. Results: Here, we demonstrate how this bulk phenomenon affects secondary electron images that predominantly contain surface information. In addition, we will show how it can be used to obtain crystallographic information. We will discuss the origin of channeling contrast in secondary electron images, illustrate this with experiments, and develop a simple geometric model to predict channeling maxima. Conclusion: Channeling plays an important role in helium ion microscopy and has to be taken into account when trying to achieve maximum image quality in backscattered helium images as well as secondary electron images. Secondary electron images can be used to extract crystallographic information from bulk samples as well as from thin surface layers, in a straightforward manner.

Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Summary Background: Helium ion microscopy is a new high-performance alternative to classical scanning electron microscopy. It provides superior resolution and high surface sensitivity by using secondary electrons. Results: We report on a new contrast mechanism that extends the high surface sensitivity that is usually achieved in secondary electron images, to backscattered helium images. We demonstrate how thin organic and inorganic layers as well as self-assembled monolayers can be visualized on heavier element substrates by changes in the backscatter yield. Thin layers of light elements on heavy substrates should have a negligible direct influence on backscatter yields. However, using simple geometric calculations of the opaque crystal fraction, the contrast that is observed in the images can be interpreted in terms of changes in the channeling probability. Conclusion: The suppression of ion channeling into crystalline matter by adsorbed thin films provides a new contrast mechanism for HIM. This dechanneling contrast is particularly well suited for the visualization of ultrathin layers of light elements on heavier substrates. Our results also highlight the importance of proper vacuum conditions for channeling-based experimental methods.

Directional Liquid Spreading over Chemically Defined Radial Wettability Gradients

We investigate the motion of liquid droplets on chemically defined radial wettability gradients. The patterns consist of hydrophobic fluorinated self-assembled monolayers (SAMs) on oxidized silicon substrates. The design comprises a central hydrophobic circle of unpatterned SAMs surrounded by annular regions of radially oriented stripes of alternating wettability, i.e., hydrophilic and hydrophobic. Variation in the relative width of the stripes allows control over the macroscopic wettability. When a droplet is deposited in the middle, it will start to move over to the radially defined wettability gradient, away from the center because of the increasing relative surface area of hydrophilic matter for larger radii in the pattern. The focus of this article is on a qualitative description of the characteristic motion on such types of anisotropic patterns. The influence of design parameters such as pattern dimensions, steepness of the gradient, and connection between different areas on the behavior of the liquid are analyzed and discussed in terms of advancing and receding contact lines, contact angles, spatial extent, and overall velocity of the motion.

A high resolution ionoluminescence study of defect creation and interaction

Helium ion microscopy has been used to investigate the ionoluminescence of NaCl. A 35 keV, sub-nanometer He(+) ion beam was used to generate ionoluminescence. The interaction of ionizing radiation with alkali halides leads to the formation of various crystal defects, in particular so-called color-centers. Their subsequent recombination with charge carriers leads to the emission of visible light. Broad peaks at 2.46 eV and 3.05 eV were measured. We have also investigated the dynamics of defect creation as a function of the beam scanning parameters (current and pixel spacing). The resolution and detection capabilities of ionoluminescence in helium ion microscopy are sensitive to both sample properties and scanning parameters.

Creation and physical aspects of luminescent patterns using helium ion microscopy

The helium ion microscope provides a sub-nanometer size He+ ion beam which can be employed for materials modification. We demonstrate how material properties can be tuned in a helium ion microscope with very high precision using, as an example, the modification of the luminescence properties of a sodium chloride crystal. Although the beam size is extremely small, the actually affected sample volume is much bigger due to collision cascades. We have directly measured the diameter of the interaction volume of the 35 keV He+ beam with a sodium chloride crystal using ionoluminescence. The experimental results are compared to stopping and range of ions in matter simulations and calculations of the point spread function.

Channeling and Backscatter Imaging

While the default imaging mode in HIM uses secondary electrons, backscattered helium or neon contains valuable information about the sample composition and structure. In this chapter, we will discuss how backscattered helium can be used to obtain information about buried structures and provide qualitative elemental contrast. The discussion is extended to the use of channeling to increase image quality and obtain crystallographic information. As an example, we demonstrate that the period of a dislocation network in a film only two monolayers thick can be obtained with atomic precision.