Veit Preidel

5 × 5 cm² silicon photonic crystal slabs on glass and plastic foil exhibiting broadband absorption and high-intensity near-fields.

Crystalline silicon photonic crystal slabs are widely used in various photonics applications. So far, the commercial success of such structures is still limited owing to the lack of cost-effective fabrication processes enabling large nanopatterned areas (≫ 1 cm2). We present a simple method for producing crystalline silicon nanohole arrays of up to 5 × 5 cm2 size with lattice pitches between 600 and 1000 nm on glass and flexible plastic substrates. Exclusively up-scalable, fast fabrication processes are applied such as nanoimprint-lithography and silicon evaporation. The broadband light trapping efficiency of the arrays is among the best values reported for large-area experimental crystalline silicon nanostructures. Further, measured photonic crystal resonance modes are in good accordance with light scattering simulations predicting strong near-field intensity enhancements greater than 500. Hence, the large-area silicon nanohole arrays might become a promising platform for ultrathin solar cells on lightweight substrates, high-sensitive optical biosensors, and nonlinear optics.

Balance of optical, structural, and electrical properties of textured liquid phase crystallized Si solar cells

Liquid phase crystallized Si thin-film solar cells on nanoimprint textured glass substrates exhibiting two characteristic, but distinct different surface structures are presented. The impact of the substrate texture on light absorption, the structural Si material properties, and the resulting solar cell performance is analyzed. A pronounced periodic substrate texture with a vertical feature size of about 1 μm enables excellent light scattering and light trapping. However, it also gives rise to an enhanced Si crystal defect formation deteriorating the solar cell performance. In contrast, a random pattern with a low surface roughness of 45 nm allows for the growth of Si thin films being comparable to Si layers on planar reference substrates. Amorphous Si/crystalline Si heterojunction solar cells fabricated on the low-roughness texture exhibit a maximum open circuit voltage of 616 mV and internal quantum efficiency peak values exceeding 90%, resulting in an efficiency potential of 13.2%. This demonstrates that high quality crystalline Si thin films can be realized on nanoimprint patterned glass substrates by liquid phase crystallization inspiring the implementation of tailor-made nanophotonic light harvesting concepts into future liquid phase crystallized Si thin film solar cells on glass.

A novel light trapping concept for liquid phase crystallized poly-Si thin-film solar cells on periodically nanoimprinted glass substrates

Large grained polycrystalline silicon (poly-Si) absorbers were realized by electron beam induced liquid phase crystallization on 2 μm periodically patterned glass substrates and processed into a-Si:H/poly-Si heterojunction thin-film solar cells. The substrates were structured by nanoimprint lithography using a UV curable hybrid polymer sol-gel resist, resulting in a glassy high-temperature stable micro-structured surface. Structural analysis yielded high quality poly-Si material with grain sizes up to several hundred micrometers. An increase of absorption and an enhancement of the external quantum efficiency in the NIR as a consequence of light trapping due to the micro-structured poly-Si/substrate interface were observed. Up to now, only moderate solar cell parameters, a maximum open-circuit voltage of 413 mV and a short-circuit current density of 8 mA cm-2, were measured being significantly lower to what can be achieved with liquid phase crystallized poly-Si thin-film solar cells on planar glass substrates indicating that the substrate texture has impact on the electrical material quality. By reduction of the SiC interlayer thickness at the micro-structured poly- Si/substrate interface defect-related parasitic absorption was considerably minimized. This encourages the implementation of nanoimprinted tailored substrate textures for light trapping in liquid phase crystallized poly-Si thinfilm solar cells.

Correlation between structural and opto-electronic characteristics of crystalline Si microhole arrays for photonic light management

By employing electron paramagnetic resonance spectroscopy, transmission electron microscopy, and optical measurements, we systematically correlate the structural and optical properties with the deep-level defect characteristics of various tailored periodic Si microhole arrays, which are manufactured in an easily scalable and versatile process on nanoimprinted sol-gel coated glass. While tapered microhole arrays in a structured base layer are characterized by partly nanocrystalline features, poor electronic quality with a defect concentration of 1017 cm−3 and a high optical sub-band gap absorption, planar polycrystalline Si layers perforated with periodic arrays of tapered microholes are composed of a compact crystalline structure and a defect concentration in the low 1016 cm−3 regime. The low defect concentration is equivalent to the one in planar state-of-the-art solid phase crystallized Si films and correlates with a low optical sub-band gap absorption. By complementing the experimental characterization...

Nanophotonic light trapping in polycrystalline silicon thin-film solar cells using periodically nanoimprint-structured glass substrates

A smart light trapping scheme is essential to tap the full potential of polycrystalline silicon (poly-Si) thin-film solar cells. Periodic nanophotonic structures are of particular interest as they allow to substantially surpass the Lambertian limit from ray optics in selected spectral ranges. We use nanoimprint-lithography for the periodic patterning of sol-gel coated glass substrates, ensuring a cost-effective, large-area production of thin-film solar cell devices. Periodic crystalline silicon nanoarchitectures are prepared on these textured substrates by high-rate silicon film evaporation, solid phase crystallization and chemical etching. Poly-Si microhole arrays in square lattice geometry with an effective thickness of about 2μm and with comparatively large pitch (2 μm) exhibit a large absorption enhancement (A900nm = 52%) compared to a planar film (A900nm ~ 7%). For the optimization of light trapping in the desired spectral region, the geometry of the nanophotonic structures with varying pitch from 600 nm to 800 nm is tailored and investigated for the cases of poly-Si nanopillar arrays of hexagonal lattice geometry, exhibiting an increase in absorption in comparison to planar film attributed to nanophotonic wave optic effects. These structures inspire the design of prospective applications such as highly-efficient nanostructured poly-Si thin-film solar cells and large-area photonic crystals.