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Dive into the research topics where Vikas Sachan is active.

Publication


Featured researches published by Vikas Sachan.


Archive | 2003

Composition and method for polishing in metal cmp

Vikas Sachan; Elizabeth A. Langlois; Qianqiu Ye; Keith G. Pierce; Craig D. Lack; Terence M. Thomas; Peter A. Burke; David Gettman; Sarah Lane


Archive | 2000

Polishing compositions for noble metals

Vikas Sachan; Heinz F. Reinhardt; Terence M. Thomas


Archive | 2001

Control of removal rates in CMP

Terence M. Thomas; Qianqiu Ye; Joseph K. So; Peter A. Burke; Vikas Sachan; Elizabeth A. Langlois; Keith G. Pierce; Craig D. Lack; David Gettman; Hiroyuki Senoo; Kouchi Yoshida; Yoshikazu Nishida; Vilas N. Koinkar; Raymond Lee Lavoie Jr.


Archive | 1999

Method to decrease dishing rate during cmp in metal semiconductor structures

Keith G. Pierce; Elizabeth A. Langlois; David Gettman; Vikas Sachan; Peter A. Burke


Archive | 2001

Dissolution of metal particles produced by polishing

Tony Quan Tran; Vikas Sachan; David Gettman; Terence M. Thomas; Craig D. Lack; Peter A. Burke


Archive | 2002

Polishing composition for CMP having abrasive particles

Hongyu Wang; Terence M. Thomas; Qianqiu Ye; Heinz F. Reinhardt; Vikas Sachan


Archive | 1999

Methods to control film removal rates for improved polishing in metal CMP

Vikas Sachan; Peter A. Burke; Elizabeth A. Langlois; Keith G. Pierce


Archive | 2000

Improved chemical mechanical polishing slurries for metal

Craig D. Lack; Qiuliang Luo; Qianqiu Christine Ye; Vikas Sachan; Terence M. Thomas; Peter A. Burke


Archive | 2000

Chemical mechanical polishing slurries for metal

Craig D. Lack; Qiuliang Luo; Qianqiu Ye; Vikas Sachan; Terence M. Thomas; Peter A. Burke


Archive | 2000

Slurry solution for polishing copper or tungsten

Terence M. Thomas; Peter A. Burke; Vikas Sachan; Craig D. Lack; Qiuliang Luo

Collaboration


Dive into the Vikas Sachan's collaboration.

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