Vincent Mortet

Surface acoustic wave propagation in aluminum nitride-unpolished freestanding diamond structures

High-quality surface acoustic wave (SAW) filters based on aluminum nitride (AlN)/diamond layered structures were prepared using the nucleation side of polycrystalline chemical vapor deposition (CVD) diamond, removed from a silicon substrate by wet etching. Highly oriented AlN thin films with optimized piezoelectric properties and with various thicknesses were sputtered onto the nucleation side of freestanding diamond. The effect of AlN thickness on the SAW phase velocity, the coupling coefficient, and the device characteristics were investigated. Experimental results show that the Rayleigh wave and the higher modes are generated. These results agree well with calculated dispersion curves and demonstrate that a high electromechanical coupling coefficient together with a high phase velocity can be obtained by using the nucleation side of freestanding CVD diamond layer.

5GHz surface acoustic wave devices based on aluminum nitride/diamond layered structure realized using electron beam lithography

Very high frequency surface acoustic wave (SAW) devices based on AlN/diamond layered structures were fabricated by direct writing using e-beam lithography on the nucleation side of chemical vapor deposition diamond. The interdigital transducers made in aluminum with resolutions down to 500nm were patterned on AlN/diamond layered structure with an adapted technological process. Experimental results show that the Rayleigh wave and the higher modes are generated. The fundamental frequency around 5GHz was obtained for this layered structure SAW device and agrees well with calculated results from dispersion curves of propagation velocity and electromechanical coupling coefficient.

High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

High performances surface acoustic wave (SAW) filters based on aluminium nitride (AlN)/diamond layered structure have been fabricated. The C-axis oriented aluminum nitride films with various thicknesses were sputtered on unpolished nucleation side of free-standing polycrystalline chemical vapor deposition (CVD) diamond obtained by silicon substrate etching. Experimental results show that high order modes as well as Rayleigh waves are excited. Experimental results are in good agreement with the theoretical dispersion curves determined by software simulation with Greens function formalism. We demonstrate that high phase velocity first mode wave (so-called Sezawa wave) with high electromechanical coupling coefficient are obtained on AlN/diamond structure. This structure also has a low temperature coefficient of frequency (TCF), and preliminary results suggest that a zero TCF could be expected.

High-frequency surface acoustic wave devices based on AlN/diamond layered structure realized using e-beam lithography

We report in this paper on the study and the realization of surface acoustic wave devices based on an AlN/diamond layered structure intended for the X band (8 GHz). Both x-ray diffraction and transmission electronic microscopy, used for characterization of the structural properties of the AlN/diamond structure, have shown (002) highly oriented sputtered AlN films on free-standing chemical vapor deposition diamond films. Surface roughness of the AlN/diamond structure was measured by atomic force microscopy and showed a very low surface roughness, less than 1 nm. Low surface roughness is very important to reduce the acoustic propagation losses. SAW devices operating in the range of 8 GHz were realized by the combination of the high velocity of the AlN/diamond layered structure and the high lateral resolution obtained using e-beam lithography (EBL). Due to high electrical resistivity of the AlN film, interdigital transducers with submicronic resolution were patterned by an adapted technological EBL process. ...

Wide range pressure sensor based on a piezoelectric bimorph microcantilever

Since the development of the atomic force microscope, interest in microfabricated cantilevers has grown. Cantilevers are excellent micromechanical sensors. In this work, we use a commercially available piezoelectric bimorph cantilever as pressure and temperature sensor. The piezoelectric layer acts as both sensor and actuator. The sensor detects the change in the resonance frequencies due to the drag force of the surrounding gas. The frequency shift of the resonant modes is measured as a function of the pressure and the temperature. The results show that both pressure and temperature can be measured simultaneously using the piezoelectric bimorph cantilever’s resonant frequencies.

Deposition of aluminium nitride film by magnetron sputtering for diamond-based surface acoustic wave applications

Diamond/piezoelectric material thin film layered structures are expected to be applied to high frequency surface acoustic wave (SAW) devices because of the high acoustic wave velocity of diamond. Aluminium nitride (AlN) has been chosen as piezoelectric material because of its both high phase velocity and high resistivity. AIN thin films have been deposited by DC pulsed magnetron sputtering on Si(100) substrates. Texture and structure of the films have been investigated by X-ray diffraction, cross-section and in-plane view scanning electronic microscopy observation, and atomic force microscopy. One-micron thick, smooth and (002) oriented AlN films have been successfully deposited on freestanding chemical vapour deposition (CVD) diamond layers. The surface acoustic wave characteristics of AlN/diamond structure were investigated.

Magnetoelectric effect near spin reorientation transition in giant magnetostrictive-aluminum nitride thin film structure

Hybrid giant magnetostrictive-piezoelectric film/film structures exhibiting magnetoelectric (ME) effect associated with a magnetic instability of the spin reorientation transition type are presented. We first present the theoretical study of a clamped beam actuator composed of a piezoelectric layer on a substrate actuated by a magnetostrictive layer. The actuator is a polished 50 μm thick 18×5 mm2 silicon substrate coated by an electrode, aluminum nitride, and magnetostrictive nanostructured layer. A ME coefficient of 30 V Oe−1 cm−1 at a 35 KHz longitudinal resonance was measured. Nonlinear excitation of this mode showed a “nonlinear” dynamic ME coefficient of 4 V Oe−1 cm−1.

Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter

In this work, the effect of a diamond nucleation process on freestanding aluminium nitride (AlN)/diamond surface acoustic wave (SAW) device performances was studied. Before diamond deposition, silicon (Si) substrates have been mechanically nucleated, using an ultrasonic vibration table with submicron diamond slurry, and bias-enhanced nucleated (BEN). Freestanding diamond layers obtained on mechanically scratched Si substrates exhibit a surface roughness of R/sub MS/=13 nm, whereas very low surface roughness (as low as R/sub MS//spl les/1 nm) can be achieved on a freestanding BEN diamond layer. Propagation losses have been measured as a function of the operating frequency for the two nucleation techniques. Dispersion curves of phase velocities and electromechanical coupling coefficient (K/sup 2/) were determined experimentally and by calculation as a function of normalized thickness AlN film (kh/sub AlN/=2/spl pi/h/sub AlN///spl lambda/). Experimental results show that the propagation losses strongly depend on the nucleation technique, and that these losses are weakly increased with frequency when the BEN technique is used.

Radiometric characteristics of new diamond PIN photodiodes

New PIN photodiode devices based on CVD diamond have been produced showing high responsivity in a narrow bandpass around 200 nm. A set of measurement campaigns was carried out to obtain their XUV-to-VIS characterization (responsivity, stability, linearity, homogeneity). The responsivity has been measured from the XUV to the NIR, in the wavelength range of 1 nm to 1127 nm (i.e. 1240 to 1.1 eV). The diamond detectors exhibit a high responsivity of 10 to 30 mA W−1 around 200 nm and demonstrate a visible rejection ratio (200 nm versus 500 nm) of six orders of magnitude. We show that these PIN diamond photodiodes are sensitive sensors in the 200 to 220 nm range, stable under brief irradiation with a good linearity and homogeneity. They will be used for the first time in a solar physics space instrument LYRA, the Large Yield RAdiometer.

New developments on diamond photodetector for VUV solar observations

A new large-size metal–semiconductor–metal photoconductor device of 4.6 mm in diameter based on diamond material has been reprocessed and characterized in the vacuum-ultraviolet (VUV) wavelength range. The metal finger contacts have been processed to 2 µm in width with spacing between the contacts of 5 µm for a bias voltage of 5 V. The responsivity, stability, linearity and homogeneity have been tested. Solutions and progresses on diamond processing are identified and are reported. In the VUV wavelength range of interest, the diamond photodetector is sensitive with a maximum response of 48 mA W−1 at 210 nm with a corresponding external quantum efficiency of 42%, homogenous and stable under short irradiation. It indicates a 200–400 nm rejection ratio of more than four orders of magnitude and demonstrates the advantages of diamond-based detectors in terms of high rejection ratio and high output signal for VUV solar observation missions.