Volker Wittmer

Optimized glass-ceramic substrate materials for EUVL applications

EUV substrate materials have to meet enhanced requirements with respect to extreme low thermal expansion, high homogeneity and superior surface quality. A SCHOTT R&D program aims at the development of advanced materials covering these various aspects. The glass-ceramic Zerodur (registered trademark) of SCHOTT represents a substrate material currently used for EUV masks and optics of first generation tools due to its extremely low coefficient of thermal expansion (CTE) and its excellent homogeneity. Zerodur(registered trademark) even allows continuous shifting of the position of zero crossing of the CTE-slope to control the thermal expansion behavior according to varying customer requirements: As a result of specifically adjusted process parameters, samples of Zerodur (registered trademark) exhibit a coefficient of thermal expansion CTE < 5 ppb/K corresponding to the lowest expansion class of the SEMI standard P37 (19 to 25°C) for EUV mask blanks. By further variation of process parameters, the position of zero crossing, e.g. at 22.5°C or 30°C, can be varied, revealing an attractive attribute feature of Zerodur (registered trademark). A new dilatometer type reveals an improved reproducibility of ~ 1ppb/K in the temperature range of 0 to 50°C. A series of CTE(0;50°C) measurements with a test-cube of Zerodur (registered trademark) provides information on CTE homogeneity on a cm-scale: no CTE variation was observed within the error of measurements (1ppb/K) for a block exhibiting ± 3.5*10-6 variation in refractive index. CTE variation can cause surface deformations during changing temperature conditions. A Fizeau-Interferometer was used to record surface roughness at two different temperatures. This non- destructive metrology is regarded as a method to distinguish CTE variation < 1ppb/K. The surface deformation of Zerodur (registered trademark) due to elevated temperature was determined to be lower than the resolution. Both methods to analyze the CTE homogeneity of Zerodur (registered trademark) lead to the result of CTE variation below 1 ppb/K. Surface treatment of glass-ceramic material is a major challenge as final finishing of EUV substrates may increase roughness of super-polished surfaces significantly. Improved new glass-ceramic materials demonstrate optimization of glass-ceramic compositions to nearly meeting the specification of surface roughness after a standard finishing process. Recent achievements of material development reveal CTE-performance of this new glass-ceramic to also be adjustable to varying customer needs as already known for Zerodur (registered trademark). These results are regarded as a promising milestone to develop an optimized glass-ceramic material, because the features of the modified New-Glass Ceramic now better match the key requirements of EUVL substrate materials.

Glass Micro-Optics for Laser Beam Shaper and LED Collimation

A design and measurements of glass diffractive optical beam shaper is shown generating a ‘flat hat’ light distribution. Furthermore the design of a LED collimation lens is presented including the manufacturing as lens array.

Large optical glass blanks for the ELT generation

The upcoming extremely large telescope projects like the E-ELT, TMT or GMT telescopes require not only large amount of mirror blank substrates but have also sophisticated instrument setups. Common instrument components are atmospheric dispersion correctors that compensate for the varying atmospheric path length depending on the telescope inclination angle. These elements consist usually of optical glass blanks that have to be large due to the increased size of the focal beam of the extremely large telescopes. SCHOTT has a long experience in producing and delivering large optical glass blanks for astronomical applications up to 1 m and in homogeneity grades up to H3 quality in the past. The most common optical glass available in large formats is SCHOTT N-BK7. But other glass types like F2 or LLF1 can also be produced in formats up to 1 m. The extremely large telescope projects partly demand atmospheric dispersion components even in sizes beyond 1m up to a range of 1.5 m diameter. The production of such large homogeneous optical glass banks requires tight control of all process steps. To cover this demand in the future SCHOTT initiated a research project to improve the large optical blank production process steps from melting to annealing and measurement. Large optical glass blanks are measured in several sub-apertures that cover the total clear aperture of the application. With SCHOTTs new stitching software it is now possible to combine individual sub-aperture measurements to a total homogeneity map of the blank. In this presentation first results will be demonstrated.

ZERODUR 8m mirror for space telescope

In 2010 ESO will celebrate the 10th anniversary of the fourth 8 m telescope Yepuns first light event. Together with the other VLT telescopes it has accumulated more than 40 years of extremely successful operation time for astronomy. Progress in rocket technology and in ZERODUR® light weighting gives reason for contemplating about the use of the last currently available 8.2 m blank for a space telescope. This paper will review the outstanding quality of the first four mirror blanks and present the quality of the blank still available. Additionally we will give an overview over the progress in the last decade in technology and knowledge and how they might support the use of the 8 m blank as space telescope mirror.