Vyacheslav Yunkin

Large-acceptance diamond planar refractive lenses manufactured by laser cutting

For the first time, single-crystal diamond planar refractive lenses have been fabricated by laser micromachining in 300 µm-thick diamond plates which were grown by chemical vapour deposition. Linear lenses with apertures up to 1 mm and parabola apex radii up to 500 µm were manufactured and tested at the ESRF ID06 beamline. The large acceptance of these lenses allows them to be used as beam-conditioning elements. Owing to the unsurpassed thermal properties of single-crystal diamond, these lenses should be suitable to withstand the extreme flux densities expected at the planned fourth-generation X-ray sources.

Fourier crystal diffractometry based on refractive optics

X-ray refractive lenses are proposed as a Fourier transformer for high-resolution X-ray crystal diffraction. By employing refractive lenses the wave transmitted through the object converts into a spatial intensity distribution at its back focal plane according to the Fourier-transform relations. A theoretical consideration of the Fourier-transform technique is presented. Two types of samples were studied in Bragg reflection geometry: a grating made of strips of a thin SiO2 film on an Si substrate and a grating made by profiling an Si crystal. Fourier patterns recorded at different angles along the rocking curves of the Si 111 Bragg reflection were analysed.

Linear parabolic single-crystal diamond refractive lenses for synchrotron X-ray sources

Linear parabolic diamond refractive lenses are presented, designed to withstand high thermal and radiation loads coming from upgraded accelerator X-ray sources. Lenses were manufactured by picosecond laser treatment of a high-quality single-crystal synthetic diamond. Twelve lenses with radius of curvature at parabola apex R = 200 µm, geometrical aperture A = 900 µm and length L = 1.5 mm were stacked as a compound refractive lens and tested at the ESRF ID06 beamline. A focal spot of size 2.2 µm and a gain of 20 were measured at 8 keV. The lens profile and surface quality were estimated by grating interferometry and X-ray radiography. In addition, the influence of X-ray glitches on the focusing properties of the compound refractive lens were studied.

X-ray multilens interferometer based on Si refractive lenses

We report a multilens X-ray interferometer consisting of six parallel arrays of planar compound refractive lenses, each of which creates a diffraction limited beam under coherent illumination. Overlapping such coherent beams produces an interference pattern demonstrating substantially strong longitudinal functional dependence. The interference fringe pattern produced by multilens interferometer was described by Talbot imaging formalism. Theoretical analysis of the interference pattern formation was carried out and corresponding computer simulations were performed. The proposed multilens interferometer was experimentally tested at ID06 ESRF beamline in the X-ray energy range from 10 to 30 keV. The experimentally recorded fractional Talbot images are in a good agreement with computer simulations.

High energy X-ray nanofocusing by silicon planar lenses

Optimizing the lens design and improving the technological process, we manufactured X-ray planar compound refractive lenses with vertical sidewalls up to 70 microns deep. The lens surface roughness in the order of 20 nm was attained. The minimal thickness of the material between two individual lenses of 2 μm was realized. The optical tests of the new planar lenses were performed at the ESRF BM05 and ID15 beamlines. The technological breakthrough allows reaching the nanometer focusing. The resolution below 200 nm was measured in the energy region of 15–80 keV. The best resolution of 150 nm was demonstrated at 50 keV X-rays.

Silicon planar lenses for high-energy x-ray nanofocusing

Optimizing the lens design and improving the technological process, we manufactured X-ray planar compound refractive lenses with vertical sidewalls up to 70 microns deep. The lens surface roughness in the order of 20 nm was attained. The minimal thickness of the material between two individual lenses of 2 µm was realized. Driven by the requirements of new 100 m-long beamlines at the ESRF, the first prototype chip of Si planar nanofocusing lenses was designed and manufactured. The technological breakthrough allows to reach the nanometer focusing. The optical tests of the new planar lenses were performed at the ESRF beamlines BM5 and ID15. The resolution below 200 nm was measured in the energy region of 15-80 keV. The best resolution of 150 nm was demonstrated at 50 keV energy. As a next step dedicated chip design for two-dimensional focusing with nanopositioning stages will be realized.

Stacked Fresnel Zone Plates for High Energy X‐rays

A stacking technique was developed in order to increase focusing efficiency of Fresnel zone plates (FZP) at high energies. Two identical Si chips each of which containing 9 FZPs were used for stacking. Alignment of the chips was achieved by on‐line observation of the moire pattern. The formation of moire patterns was studied theoretically and experimentally at different experimental conditions. To provide the desired stability Si‐chips were bonded together with slow solidification speed epoxy glue. A technique of angular alignment in order to compensate a linear displacement in the process of gluing was proposed. Two sets of stacked FZPs were experimentally tested to focus 15 and 50 keV x rays. The gain in the efficiency by factor 2.5 was demonstrated at 15 keV. The focal spot of 1.8 μm vertically and 14 μm horizontally with 35% efficiency was measured at 50 keV. Forecast for the stacking of nanofocusing FZPs was discussed.

Polymer X-ray refractive nano-lenses fabricated by additive technology

The present work demonstrates the potential applicability of additive manufacturing to X-Ray refractive nano-lenses. A compound refractive lens with a radius of 5 µm was produced by the two-photon polymerization induced lithography. It was successfully tested at the X-ray microfocus laboratory source and a focal spot of 5 μm was measured. An amorphous nature of polymer material combined with the potential of additive technologies may result in a significantly enhanced focusing performance compared to the best examples of modern X-ray compound refractive lenses.

30-Lens interferometer for high-energy X-rays.

A novel high-energy multi-lens interferometer consisting of 30 arrays of planar compound refractive lenses is reported. Under coherent illumination each lens array creates a diffraction-limited secondary source. Overlapping such coherent beams produces an interference pattern demonstrating strong longitudinal functional dependence. The proposed multi-lens interferometer was tested experimentally at the 100 m-long ID11 ESRF beamline in the X-ray energy range from 30 to 65 keV. The interference pattern generated by the interferometer was recorded at fundamental and fractional Talbot distances. An effective source size (FWHM) of the order of 15 µm was determined from the first Talbot image, proving the concept that the multi-lens interferometer can be used as a high-resolution tool for beam diagnostics.

Planar parabolic refractive lenses for hard x-rays: technological aspects of fabrication

Planar parabolic refractive lenses are becoming the key optical elements for many hard x-ray microprobe and microscopy applications at third generation synchrotron radiation sources (e.g. the ESRF), as well as they are promising candidates for future X-ray free-electron lasers. In this paper we review all technological limitations taking place during fabrication of silicon and non-silicon refractive lenses and propose some approaches to overcome these limitations in order to fabricate high performance refractive lenses in terms of aperture, gain and focal spot size etc. We propose to use low-temperature silicon bonding techniques as alternative for very deep etching. Combination of two etched silicon structures by bonding of two lenses with relief to relief doubles the lens relief depth.