W. D. Song

Pulsed laser-assisted surface structuring with optical near-field enhanced effects

The effects of optical resonance and near field in the interaction of transparent particles on a substrate with laser light have been examined experimentally and theoretically. It is found that pits can be created at the contacting point between the particle and the metallic surface by laser irradiation (KrF,λ=248 nm) with a single pulse. The influence of the particle size and the laser fluence on the structuring of the surface has been investigated. The size of the particle ranges from 1.0 μm to 140 nm in diameter. The morphologies of the holes created have been characterized by an atomic force microscope and a scanning electron microscope. For constant laser fluence, the created hole is sensitive to the particle size. For higher-laser fluence, the corresponding hole becomes larger and deeper. With a low fluence of 300 mJ/cm2 and for 140 nm particles, the lateral dimensions of created pits can be down to 30 nm. With a high fluence of 750 mJ/cm2 and 1.0 μm particles, the diameter and the depth of created ...

Dry laser cleaning of particles from solid substrates: Experiments and theory

The experimental analysis of dry laser cleaning efficiency is done for certified spherical particle (SiO2, 5.0, 2.5, 1.0, and 0.5 μm) from different substrates (Si, Ge, and NiP). The influence of different options (laser wavelength, incident angle, substrate properties, i.e., type of material, surface roughness, etc.) on the cleaning efficiency is presented in addition to commonly analyzed options (cleaning efficiency versus laser fluence and particle size). Found laser cleaning efficiency demonstrates a great sensitivity to some of these options (e.g., laser wavelength, angle of incidence, etc.). Partially these effects can be explained within the frame of the microelectronics engineering (MIE) theory of scattering. Other effects (e.g., influence of roughness) can be explained along the more complex line, related to examination of the problem “particle on the surface” beyond the MIE theory. The theory of dry laser cleaning, based on one-dimensional thermal expansion of the substrate, demonstrates a great...

Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation

Spherical 0.5-μm silica particles were placed on a silicon (100) substrate. After laser illumination with a 248-nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. The mechanism of the formation of the subwavelength structure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. Theoretically calculated near-field light intensity distribution was presented, which was in agreement with the experimental result. The method of particle-enhanced laser irradiation has potential applications in nanolithography.

Laser removal of particles from magnetic head sliders

A quantitative investigation of laser‐induced removal of particles from magnetic head slider surfaces has been carried out. The damage thresholds of magnetic head sliders for laser fluence and pulse number were found to be about 150 mJ/cm2 and 5000 pulses at 100 mJ/cm2, respectively. For laser fluence or pulse number above the damage threshold, laser irradiation onto magnetic head slider surfaces can cause microcracks around the pole tips. It is found that laser cleaning efficiency increases with increasing laser fluence and pulse number, but does not depend on repetition rate up to 30 Hz. Laser cleaning efficiency of removing particles from magnetic head slider surfaces can reach about 90% for Al particles and 100% for Sn particles, respectively, under appropriate conditions without causing damage. The mechanisms of laser cleaning of particles from magnetic head slider are laser‐induced surface vibration, particle vibration, particle thermal expansion, and ablation with high laser fluence, which produce forces strong enough to detach particles from slider surfaces. Based on the above cleaning mechanisms, the dependence of laser cleaning efficiency on laser parameters can be explained.

Mechanisms of photoluminescence from silicon nanocrystals formed by pulsed-laser deposition in argon and oxygen ambient

We have investigated the different mechanisms of photoluminescence (PL) of silicon nanocrystals due to the quantum confinement effect (QCE) and interface states. Si nanocrystals were formed by pulsed-laser deposition in inert argon and reactive oxygen gas. The collisions between the ejected species greatly influence the morphology of the Si nanocrystals and cause a transition from a film structure to a porous cauliflowerlike structure, as the ambient gas pressure increases from 1 mTorr to 1 Torr. The oxygen content of the Si nanocrystals increases with increasing O2 ambient pressure, and nearly SiO2 stoichiometry is obtained when the O2 pressure is higher than 100 mTorr. Broad PL spectra are observed from Si nanocrystals. The peak position and intensity of the PL band at 1.8–2.1 eV vary with ambient gas pressure, while intensity changes and blueshifts are observed after oxidation and annealing. The PL band at 2.55 eV shows vibronic structures with periodic spacing of 97±9 meV, while no peak shift is found...

Pulsed-laser assisted nanopatterning of metallic layers combined with atomic force microscopy

In this study, the nanostructure fabrication on metallic surfaces using a pulsed laser in combination with an AFM is reported. Nanopatterns such as pit and multilines were created. Dependence of pit apparent depth on the laser fluence and laser pulse numbers has been investigated. Chemical components of the modified features were analyzed by Auger electron spectroscopy ~AES!. The morphologies of created features were characterized by AFM and scanning electron microscope ~SEM!. Thermal expansion of the tip, the field enhancement underneath the tip and the sample heating were estimated. Experimental results and mechanisms of nanostructure formation are discussed. We hope that our experiments will contribute further to the study of mechanisms of the photoassisted nanoprocessing.

Phase change behaviors of Sn-doped Ge–Sb–Te material

Sn-doped Ge–Sb–Te material was prepared by laser synthesis. It has a rocksalt crystal structure for Sn doping content less than 30at.%. A phase change temperature tester was developed to in situ measure crystallization temperature and melting point of Sn-doped Ge–Sb–Te. The crystalliza-tion temperature of Sn-doped Ge–Sb–Te is close to that of Ge2Sb2Te5 while its melting point is much lower than that of Ge2Sb2Te5. The melting points of Sn9.8Ge20.3Sb28.4Te41.5 and Sn18.8Ge19.5Sb25.3Te36.4 are 475 and 450°C, respectively. The crystallization speed was tested by an ultraviolet light at pulse duration of 30ns. It exhibits a high crystallization speed.

Studies of carbon nitride thin films synthesized by KrF excimer laser ablation of graphite in a nitrogen atmosphere

Carbon nitride thin films were deposited on silicon wafers by pulsed KrF excimer laser (wavelength 248 nm, duration 23 ns) ablation of graphite in a nitrogen atmosphere. Different excimer laser fluences and pressures of the nitrogen atmosphere were used in order to achieve a nitrogen content as high as possible in the deposited thin films. Fourier transform infrared and x-ray photoelectron spectroscopies were used to identify the binding structure and the content of the nitrogen species in the deposited thin films. The N/C ratio 0.42 was obtained at an excimer laser fluence of 0.8 J cm−2 at a repetition rate of 10 Hz under a nitrogen pressure of PN=100 mTorr. A high content of C=N double bond instead of C≡N triple band was indicated in the deposited thin films. Ellipsometry was used to analyze the optical properties of the deposited thin films. The carbon nitride thin films have amorphous-semiconductorlike characteristics with an optical band gap Eopt of 0.42 eV.

Laser induced removal of spherical particles from silicon wafers

Laser-induced removal of spherical silica particles from silicon wafers was investigated. The cleaning efficiency and laser cleaning thresholds for particles with diameters of 0.5, 1.0, 2.5, and 5.0 μm were carefully measured. It is found that the cleaning efficiency is more sensitive to laser fluence than laser pulse number and repetition frequency. The particle ejecting energies were found to increase with laser fluence. The threshold laser fluences for removing particles with sizes of 0.5 and 1.0 μm are 225 and 100 mJ/cm2, respectively, when KrF excimer laser is used. The threshold laser fluences are only a value below 5.0 mJ/cm2 for particles with a size of 2.5 and 5 μm. A model including both linear expansion and elastic deformation model was proposed to explain the experimental results. With this model, the particle movement and deformation in laser cleaning process were calculated. The expressions for threshold laser fluences were derived. The theoretical predictions are found to be greater than the experimental results. The difference can be explained by the enhancement of light intensity near the contacting area, due to the focusing and scattering by spherical particles. This model is useful to the study of laser cleaning as well as particle adhesion and deformation on solid surfaces.

Laser surface cleaning and potential applications in disk drive industry

Laser cleaning has emerged as an effective cleaning technique for removing contaminants from solid surfaces. Dry laser cleaning and steam laser cleaning have been developed recently, relying on pulsed laser heating of the surface without and with the presence of a thin liquid coating. A cleaning model was established for removal of particles from solid surfaces by taking Van der Waals force, capillary force and cleaning force into account. The model can not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. Laser-induced removal of film-type contaminants from solid surfaces has been studied. Laser cleaning mechanisms and its applications in disk drive industry will be discussed in this article.